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Small substrate baffle for organic luminous film plating machine with automatic recognition function

A technology of automatic identification and coating machine, applied in the field of machinery, can solve problems such as costing a lot of time and material resources

Inactive Publication Date: 2005-02-16
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, one kind of sample can only be slowly made in one experimental cycle, and another kind of sample can be made in another experimental cycle, so that it takes a lot of time and material resources to obtain a useful data, which restricts the improvement of vacuum organic One of the bottlenecks in the efficiency of coating research work

Method used

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  • Small substrate baffle for organic luminous film plating machine with automatic recognition function
  • Small substrate baffle for organic luminous film plating machine with automatic recognition function
  • Small substrate baffle for organic luminous film plating machine with automatic recognition function

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Embodiment Construction

[0015] Specifically, as attached figure 2 As shown, the present invention is provided with a supporting plate 12 between the substrate 7 on the planetary rotating substrate holder 8 and the large substrate baffle plate 6, and the supporting plate 12 is installed on the revolution axis of the planetary rotating substrate holder 8 13, rotates synchronously with 8 on the planetary rotary substrate holder. Small substrate baffles are installed on the supporting plate 12, the position of each small baffle corresponds to the hole position of each substrate, and each small substrate baffle can control the coating on the corresponding substrate in one experimental cycle. Like this, just can be provided with a plurality of substrates (>=2) on the planetary rotary substrate holder 8 of the same vacuum chamber, correspondingly a plurality of small baffles are set on the supporting plate 12, and a plurality of small baffles are arranged around the common The rotating shafts (13) are arr...

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Abstract

The present invention relates to machines and is especially a small baffle installed before the substrate holder of organic luminous film plating machine and with automatic recognition function. The small substrate baffle consists of a baffle comprising two semi-circular plates one a support board and rotating synchronous with the substrate holder, a magnetically driven manipulator, a pull-push control plate, a sensor, a position detector and an automatic recognition circuit. The small substrate baffle may be used in controlling the filming conditions of corresponding substrate conveniently so as to make several samples with one experiment period and raise the work efficiency of the film plating machine effectively.

Description

technical field [0001] The invention belongs to the field of machinery, and in particular relates to a small baffle with an automatic identification function installed in front of a substrate frame of an organic light-emitting coating machine. Background technique [0002] as attached figure 1 Shown is a schematic diagram of the most basic organic vacuum coating system currently in use. The functions and names of the various parts of the system are: after the vacuum chamber 9 is evacuated to meet the requirements through the vacuuming pipeline 1, the evaporation source 3 is energized and preheated through the electrode lead 2. In order to avoid the pollution of the substrate 7 when the evaporation source is preheated, the Close the large shutter 6 for the substrate. The planetary rotating substrate holder 8 can ensure uniform film formation on the substrate 7 . The substrate holder rotating power mechanism 10 is a device for controlling the rotation and speed regulation o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/12C23C14/22C23C14/54
Inventor 侯晶莹刘立宁赵毅李传南高文宝谢文法刘式墉
Owner JILIN UNIV
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