Free-form surface coating clamping equipment

A curved surface and clamping technology, used in sputtering coating, vacuum evaporation coating, ion implantation coating and other directions, can solve the problems of poor applicability and difficult preparation of trial plating molds, and achieve the goal of reducing trial plating costs. Effect

Pending Publication Date: 2022-06-24
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to solve the technical problem that the preparation of the test plating mold is difficult and the applicability is not strong during the vacuum coating test plating process of the existing large-diameter complex curved surface components. The present invention provides a free-form surface coating clamping equipment

Method used

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  • Free-form surface coating clamping equipment
  • Free-form surface coating clamping equipment
  • Free-form surface coating clamping equipment

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Experimental program
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Effect test

Embodiment 1

[0030] like Figures 1 to 6 As shown in the figure, this embodiment provides a free-form surface coating clamping equipment, which includes a rotatable mounting frame located above, a drive mechanism 7 for driving the mounting frame to rotate above the mounting frame, and the lower part of the mounting frame is evenly distributed in an array There are tooling units with adjustable spacing, and each tooling unit includes a support 2 whose height can be adjusted and an installation mechanism 1 arranged at the end of the support 2 for installing the discrete units of the test plating components. The coating element discrete unit faces the angle adjustment mechanism 10 of the coating evaporation source 9 and has no shadow effect.

[0031] The structure of this embodiment does not require special preparation of trial plating molds, thereby reducing the cost of trial plating. When the discrete unit area is sufficiently small, the equipment can simulate various complex curved surface...

Embodiment 2

[0033] This embodiment is further optimized on the basis of Embodiment 1, specifically:

[0034] The driving mechanism 7 is a servo motor, and the driving mechanism 7 is mounted on the L-shaped bracket 6 , and the L-shaped bracket 6 is provided with a bolt assembly detachably connected to the external support base.

[0035] The mounting frame includes a horizontal mounting plate 3 and a U-shaped bracket 5 arranged on the horizontal mounting plate 3 with an opening facing downward. The two straight edge sections of the U-shaped bracket 5 are fixed on the left and right sides of the horizontal mounting plate 3. The output shaft of the motor is detachably connected to the U-shaped bracket 5 through the fixing plate 8, and the horizontal mounting plate 3 is provided with a plurality of strip holes 3-1 at equal intervals for installing the tooling unit.

[0036] The edge of each of the strip holes 3-1 is provided with a scale along the length direction to facilitate precise adjustm...

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Abstract

The invention discloses free-form surface coating clamping equipment, and relates to the technical field of vacuum coating trial plating equipment.The free-form surface coating clamping equipment comprises a rotatable mounting frame located on the upper portion, a driving mechanism for driving the mounting frame to rotate is arranged above the mounting frame, and tool units with adjustable intervals are evenly distributed below the mounting frame in an array; each tool unit comprises a height-adjustable support and a mounting mechanism which is arranged at the tail end of the support and is used for mounting the trial plating element discrete unit, and the mounting mechanism is provided with an angle adjusting mechanism which can adjust the angle of the trial plating element discrete unit facing the coating evaporation source and has no shadow effect. Various complex curved surfaces can be simulated; in addition, the multiple trial plating element discrete units can simulate the shape of a large-diameter complex curved surface through the tool units arranged in an array mode, and in the angle adjusting process of the tool units, no structure shielding the trial plating element discrete units exists, so that the shadow effect caused by shielding of evaporation materials is avoided.

Description

technical field [0001] The invention relates to the technical field of vacuum coating trial-plating equipment, and more particularly to the technical field of free-form surface coating and clamping equipment. Background technique [0002] In the vacuum coating technology of large-diameter components, it is one of the basic requirements to meet the large-area uniform film formation. Since large-diameter components are often expensive to manufacture, it is generally necessary to conduct "trial plating" before formal coating to check the uniformity of the process. For flat large-diameter components, "trial plating" is relatively simple. The usual practice is to use multiple small-sized components as the overall uniformity of large-diameter components, and make necessary uniformity corrections accordingly; [0003] When the surface of the large-diameter component is curved, the difficulty of "trial plating" is significantly increased. The traditional idea is to manufacture stere...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/50C23C14/24C23C14/54
CPCC23C14/505C23C14/24C23C14/54
Inventor 李树刚罗振飞张飞王震卫耀伟吴悦吴倩唐明罗晋张清华王健
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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