Scanning electron microscope having detachable shaft, and image acquisition method using same
An electron microscope and image acquisition technology, applied in circuits, discharge tubes, electrical components, etc., can solve the problems of rising maintenance time and costs, waste of preparation time, and time-consuming, shortening preparation time, and facilitating maintenance and management. Effect
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[0036] The present invention will be specifically described below with reference to the accompanying drawings. First of all, the terms or words used in this specification and claims should not be limited to the general meaning or the meaning in the dictionary, but should be interpreted based on the principle that the inventor can properly define the concept of the term in order to explain his invention in the best way. Meanings and concepts consistent with the technical thought of the present invention. Therefore, the embodiments described in this specification and the structures shown in the drawings are only embodiments of the present invention, and do not fully represent the technical idea of the present invention. Therefore, it should be understood that there may be many equivalents that can replace these at the time of this application. and modification examples.
[0037] As mentioned above, the axis is the core of the electron microscope, and the design and manufactur...
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