Silicon block crushing device, using method, silicon block crushing method and application method

Abstract

The invention relates to the technical field of crushing devices, in particular to a silicon block crushing device which comprises: a container for providing a containing space for a silicon rod to be crushed and executing crushing action in the containing space; two pulse electrodes which are hung in the containing space, wherein the hanging height and the positions of the two pulse electrodes in the horizontal plane can be adjusted; high-purity water is arranged in the container, the pulse electrodes generate a pulse arc in the high-purity water, the resistivity of the high-purity water is rho, the unit is M omega.cm, and rho is more than or equal to 16 M omega.cm and less than or equal to 20 M omega.cm. According to the invention, in the pulse crushing process, the medium contacted with the silicon rod is high-purity water, so that pollution caused by human or metal materials in the manual or mechanical crushing process is avoided, the pulse arc is formed at an electrode, the arc enters the polycrystalline silicon to form a plasma arc channel, and finally, the silicon rod is crushed into silicon blocks with different sizes. The invention further provides a using method of the silicon block crushing device, a silicon block crushing method and an application method.

Description

technical field [0001] The present invention relates to the technical field of crushing devices, in particular to a silicon block crushing device and its use method, a silicon block crushing method and its application method. Background technique [0002] Electronic-grade polysilicon is the basic raw material of the integrated circuit industry. It is generally produced by the improved Siemens method. Polysilicon rods are produced by chemical vapor deposition in a reduction furnace, and then crushed, screened and cleaned to obtain polysilicon of different sizes. block, so that downstream semiconductor silicon wafer manufacturers put into furnaces for single crystal pulling. [0003] Traditional crushing methods generally use tungsten alloy hammers for manual crushing, or use roller crushers for mechanical crushing, but the former is manually operated, which is easy to introduce artificial pollution during the operation, and the latter will cause excessive silicon block and me...

AI Technical Summary

Problems solved by technology

[0003] Traditional crushing methods generally use tungsten alloy hammers for manual crushing, or use roller crushers for mechanical crushing, but the former is manually operated, which is easy to introduce artificial pollution during the operation, and the latter will cause excessive silicon block and mechanical equipment. More contact, the surface of the silicon block is polluted by a large amount of metals; both of the above situations will lead to surface contamination of the silicon block, thereby affecting the quality of downstream single crystal products

Images