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Electro-optical crystal film for electro-optical modulator, preparation method and electronic component

A technology of electro-optical modulator and electro-optical crystal, which is applied in the manufacture of electrical components, optical components, semiconductor/solid-state devices, etc.

Active Publication Date: 2021-06-29
JINAN JINGZHENG ELECTRONICS
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Problems solved by technology

[0005] In order to solve the technical problem in the prior art that etching the optical waveguide on the thin film layer will cause certain damage to the thin film layer, thereby aff

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  • Electro-optical crystal film for electro-optical modulator, preparation method and electronic component
  • Electro-optical crystal film for electro-optical modulator, preparation method and electronic component
  • Electro-optical crystal film for electro-optical modulator, preparation method and electronic component

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[0034] The following will clearly and completely describe the technical solutions in the embodiments of the application with reference to the drawings in the embodiments of the application. Apparently, the described embodiments are only some of the embodiments of the application, not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without making creative efforts belong to the scope of protection of this application.

[0035] see figure 1 , the application provides a method for preparing an electro-optic crystal film for an electro-optic modulator, comprising the following steps:

[0036] Step 1. Prepare an SOI substrate, which includes a substrate layer 110 , an oxide layer 120 and a silicon layer 130 sequentially stacked from bottom to top.

[0037] SOI (Silicon-On-Insulator, silicon on insulating substrate), introduces a buried oxide layer between the top silicon layer and the substrate layer. By forming...

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Abstract

The invention discloses an electro-optical crystal film for an electro-optical modulator, a preparation method and an electronic component. The preparation method comprises the steps of preparing a target groove array on an SOI substrate laminated with an electrode layer; performing ion implantation on the electro-optical crystal substrate, and cutting the electro-optical crystal substrate into electro-optical crystal slices; transferring the electro-optical crystal slices into the corresponding grooves in the target groove array, and bonding the electro-optical crystal slices with the substrate layers in the corresponding grooves in the target groove array to obtain a bonding body; and carrying out heat treatment on the bonding body to obtain the electro-optical crystal film. The electro-optical crystal film layer reserved in each groove forms an optical waveguide structure, and optical signals of the optical waveguide are controlled through the grooves formed by the electrodes, so that the electro-optical modulation function is realized. Meanwhile, the SOI is adopted as the substrate, the characteristic that smooth surfaces exist between layers of the SOI substrate is utilized, the oxidation layer in the corresponding area is etched away in combination with a wet etching method, and then the substrate layer surface meeting the direct bonding requirement is obtained.

Description

technical field [0001] The application belongs to the technical field of semiconductors, and in particular relates to an electro-optic crystal thin film used for an electro-optic modulator, a preparation method and electronic components. Background technique [0002] Electro-optic crystal materials such as lithium niobate or lithium tantalate are widely used in nonlinear optics, ferroelectricity, and piezoelectricity due to their advantages such as high Curie temperature, strong spontaneous polarization, high electromechanical coupling coefficient, and excellent electro-optic effect. , electro-optic and other fields, especially in the fields of thin-film bulk acoustic wave devices, filters, electro-optic modulators, etc., have received more and more attention and applications. If electro-optic modulators are prepared using electro-optic crystal materials such as lithium niobate or lithium tantalate, it is necessary to further prepare the lithium niobate film into the require...

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Application Information

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IPC IPC(8): G02F1/03G02F1/035G02B6/122G02B6/136G02B6/12H01L21/304
CPCG02F1/03G02F1/0305G02F1/0316G02F1/035G02B6/122G02B6/136H01L21/3043G02B2006/12142G02B2006/12042G02B2006/12045
Inventor 刘桂银张秀全王金翠连坤
Owner JINAN JINGZHENG ELECTRONICS
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