Fast and large dynamic range wavefront detection device and detection method based on pattern recovery

Abstract

The invention discloses a fast large dynamic range wavefront detection device and detection method based on mode restoration. The method replaces the diffraction calculation process with a semi-analytic diffraction base function, and then uses matrix operations between diffraction surfaces to iteratively solve polynomial coefficients. The wavefront detection with high speed and large dynamic range is realized. The device includes a laser, a plano-convex lens, a beam expander, a lens to be tested, and an image sensor arranged in sequence. The present invention calculates the diffraction base function based on the semi-analytic diffraction theory instead of calculating the diffraction transmission process through Fourier transform, realizes the solution of the polynomial coefficients on the diffraction surface through matrix operation, does not need to return to the measurement surface, and can realize fast and accurate wavefront detection with a large dynamic range. The device uses a plano-convex lens instead of a mirror to realize the turning of the light path, which not only realizes the turning of the light path but also attenuates the light intensity. In addition, because the back surface is curved, the reflected light on the back surface does not return to the original light path to avoid interference.

Description

technical field [0001] The invention relates to the technical field of optical measurement, in particular to a fast and large dynamic range wavefront detection device and detection method based on mode restoration. Background technique [0002] With the advancement of modern technology, small-diameter grinding and turning tools based on computer control have made it possible to process large-diameter free-form surface components. Large-aperture free-form surface elements are widely used in high-power laser systems such as inertial confinement fusion. Due to the surface defects of the large-diameter optical lens itself and the processing errors left in the grinding process of small-sized processing tools, the wavefront emitted by the large-diameter optical lens is no longer an ideal wavefront. In powerful laser systems, surface errors of optical components can cause distortion of the focus spot, resulting in energy loss and damage to the laser system. Therefore, the detecti...

AI Technical Summary

Problems solved by technology

[0004] Aiming at the problems of the existing iterative phase recovery method when measuring the large wavefront error of a large-aperture optical lens, the sampling amount is large, the calculation time is long, and the device is complicated to build, the present invention provides a fast and large dynamic range wavefront detection method based on mode restoration and Device, the specific technical scheme is as follows:

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