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A method for producing high-temperature superconducting strips by ex-situ deposition of multi-source ion injection sources

A technology of high-temperature superconducting strips and spray sources, which is applied in the usage of superconducting elements, superconducting devices, superconducting/high-conducting conductors, etc., which can solve the problem of inability to accurately control the composition of the film, difficulty in controlling the uniformity of the coating, and process equipment. High cost and other issues, to achieve the effect of improving coating efficiency, improving production efficiency, and fast growth rate

Active Publication Date: 2021-09-21
SHANGHAI SUPERCONDUCTOR TECH CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The Chinese invention patent with the notification number CN110904411A discloses a method for manufacturing a superconducting cable conductor film, which uses a pulsed laser deposition molecular beam epitaxy film preparation system to produce a substrate film, but the deposition rate of the pulsed laser method is generally about 50nm / s. Its deposition rate is slow and the cost of process equipment is high
The reactive co-evaporation deposition method cannot accurately control the composition of the film and it is difficult to control the uniformity of the coating.

Method used

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  • A method for producing high-temperature superconducting strips by ex-situ deposition of multi-source ion injection sources
  • A method for producing high-temperature superconducting strips by ex-situ deposition of multi-source ion injection sources
  • A method for producing high-temperature superconducting strips by ex-situ deposition of multi-source ion injection sources

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Embodiment 1

[0033]A method of producing high-temperature superconducting strips with a multi-source ion injection source is a method of producing high-temperature superconducting strips, which is the following steps:

[0034] A. In the deposition cavity, the biaxially woven layer strip is adjacent to the target, and the number of ion guns in the multi-source ion spray is 6, and the target bombards the target to form a plasma. Well, so that the pre-drive film is formed in a mixture of a metal oxide on a buffer layer.

[0035] Among them, the buffer layer strip is a nickel group or a copper-based alloy, and the present embodiment selects a nickel-based alloy; the surface of the buffer layer is plated with CEO. 2 / Lamno 3 / MGO / Y 2 O 3 The target is GD 2 O 3 BA 2 CO 3 The uniform mixed target of three metal oxides in CuO, wherein the atomic ratios of the three elements of GD, BA, and Cu are 1: 2: 3.

[0036] The distance between the six ion guns is 2 cm, the ion gun and the target distance ar...

Embodiment 2

[0039] A multi-source ion injection source is a method of producing high-temperature superconducting strips in situ, which is an example of the preparation process of YGDBCO second-generation high temperature superconducting strip, including the following steps:

[0040] A. In the deposition cavity, the biaxially woven layer strip is adjacent to the target, and the number of ion guns in the multi-source ion spray is 6, and the target bombards the target to form a plasma. Well, so that the pre-drive film is formed in a mixture of a metal oxide on a buffer layer.

[0041] The buffer layer strip is a nickel group or a copper-based alloy, and the present embodiment selects a copper-based alloy; the surface of the buffer layer is plated with CEO. 2 / Lamno 3 / MGO / Y 2 O 3 The target is Y 2 O 3 GD 2 O 3 BA 2 CO 3 And the homogeneous mixture of four metal oxides, wherein the atomic ratio of Y, GD, Ba, and Cu is 0.5: 0.5: 2: 3.

[0042] The distance between the six ion guns is 2 cm, the...

Embodiment 3

[0046] A multi-source ion injection source is a method of producing high-temperature superconducting strips in situ deposits to contain BAZRO 3 The preparation process of doped GDBacuo second-generation high temperature superconducting strips includes the following steps:

[0047] A. In the deposition cavity, the biaxially woven buffer strip is adjacent to the target, and the number of ion guns in the multi-source ion ejection is 8, and the target bombards the target to form a plasma by 8 ion injection sources. Well, so that the pre-drive film is formed in a mixture of a metal oxide on a buffer layer.

[0048] Among them, the buffer layer strip is a nickel-based or copper-based alloy, and the present embodiment selects a copper-based alloy; the surface of the buffer layer is plated with CEO. 2 / Lamno 3 / MGO / Y 2 O 3 The target is GD 2 O 3 BA 2 CO 3 , Cuo and Bazro 3 A uniform mixing target of four metal oxides. Among them, the atomic ratios of the three elements of GD, BA, and ...

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Abstract

The invention discloses a method for producing high-temperature superconducting strips by non-situ deposition of multi-source ion jetting sources, which belongs to the technical field of preparation technology of superconducting strips, and comprises the following steps: using multi-source ion jetting to bombard a target, A strip of biaxially textured buffer layer is passed near the target such that a mixture of metal oxides is deposited on the buffer layer to form a precursor film. The precursor film first passes through a low oxygen partial pressure environment, and then passes through a higher oxygen partial pressure environment to form a superconducting film with a tetragonal phase. After absorbing oxygen, the tetragonal superconducting film completes the transformation from the tetragonal phase to the orthogonal superconducting phase, forming a superconducting strip with certain current-carrying properties. In the present invention, the superconducting thin film is realized through the technical proposal of multi-source ion gun jet deposition. Through the differential oxygen partial pressure technology, processes such as rapid generation of superconducting phases and heat treatment are realized. This technology has the advantages of high coating efficiency, fast film growth rate, precise control of film composition and uniformity, low cost, etc., and is suitable for industrial mass production.

Description

Technical field [0001] The present invention belongs to the preparation process of superconducting strip, and more particularly to a method of non-in situ deposition of non-in-situ deposition to produce high-temperature superconducting strips, and more particularly to a multi-source ion injection source non-in situ deposition production Process method of secondary high temperature superconducting strip. Background technique [0002] In 1911, the superconducting phenomenon was first discovered. In these more than 100 years, the type of superconducting material was constantly rich through the continuous efforts of countless scientists. Especially in the past 20 years, the development of superconducting materials has made great progress. Widely used in the fields of medical nuclear magnetic, nuclear fusion, superconducting cables and superconducting fluids. The second-generation high-temperature superconducting strip represented by Rebco, as high critical transition temperatures and...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01B13/00H01B12/00
CPCH01B12/00H01B13/0016H01B13/0026Y02E40/60
Inventor 赵跃师江涛程春生姜广宇朱佳敏金之俭
Owner SHANGHAI SUPERCONDUCTOR TECH CO LTD
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