A RF Inductively Coupled Plasma Superimposed Phase Gradient Metasurface Absorbing Structure

Abstract

The invention discloses a radio frequency inductively coupled plasma superimposed phase gradient metasurface absorbing structure, comprising a plasma coupling phase gradient metasurface structure, the plasma coupling phase gradient metasurface structure comprising a radio frequency inductively coupled plasma source, a phase gradient metasurface and a closed wave-transparent dielectric cavity, wherein the radio frequency inductively coupled plasma source is placed in the closed wave-transparent dielectric cavity, and the phase gradient metasurface is fixed on the outer bottom of the closed wave-transparent dielectric cavity. The phase gradient metasurface is a three-layer structure composed of a metal copper plate, a dielectric substrate, and a metal unit array from bottom to top. The metal unit array is composed of 6 H-shaped metal patches with equal width and gradually increasing height from left to right. The formed metal units are arranged repeatedly from top to bottom on the dielectric substrate. It solves the problems that the existing plasma wave-absorbing structure has a large thickness and poor structural applicability, which makes it difficult to meet the use requirements, and the problem that the electromagnetic wave attenuation range is small.

Description

technical field [0001] The invention belongs to the field of active stealth technology, and relates to a radio frequency inductively coupled plasma superimposed phase gradient metasurface absorbing structure. Background technique [0002] Anti-stealth radar technology is developing rapidly. The detection threats faced by advanced equipment in the future will expand to ultra-wide frequency bands and multi-angle domains. Reducing the electromagnetic scattering characteristics of targets has become the frontier and focus of target electromagnetic scattering control research. Since the current shape and material stealth technology is mainly aimed at the optical band, and the shape stealth can only reduce the radar scattering characteristics in key directions, the inherent wave-absorbing properties and thickness requirements of material stealth make it difficult to break through broadband stealth, and it is far from being able to achieve wide-angle, wide-band radar stealth. Comp...

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Problems solved by technology

[0004] The purpose of the present invention is to propose a radio-frequency inductively coupled plasma superimposed phase gradient metasurface absorbing structure to solve the problems that the existing plasma absorbing structure has a large thickness and poor structural applicability and is difficult to meet the use requirements, and the current The problem of small attenuation of electromagnetic waves with thin-layer plasma absorbing structures

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