A monolithic hybrid CCD structure
A hybrid, monolithic technology, used in TV, color TV parts, TV system parts, etc., can solve the problems of small slope of the output linear part, difficult and large dynamic range environmental requirements, etc., to meet the needs of large dynamic range. The effect of requesting and improving the dynamic range characteristics
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[0013] The present invention will be further described below in conjunction with the accompanying drawings.
[0014] In the description of the present invention, unless otherwise specified and limited, it should be noted that the term "connection" should be understood in a broad sense. It is directly connected or indirectly connected through an intermediate medium. For those skilled in the art, the specific meanings of the above terms can be understood according to specific situations.
[0015] like figure 1 As shown, the present invention is a monolithic hybrid CCD structure, and its preferred embodiment includes a substrate 1 and a linear array CCD unit 2 arranged on the substrate, and a TDICCD unit 3 and a TDICCD unit 3 are also arranged on the substrate 1. TDIEMCCD unit 4, the substrate 1 is a silicon substrate, so that the substrate 1 has good thermal conductivity and electrical conductivity.
[0016] The linear array CCD unit 2 includes a first horizontal register 21, ...
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