An optical free-form surface full-band aberration detection system and detection method

A detection system and full-band technology, applied in the direction of optical devices, measuring devices, instruments, etc., can solve the problems of incompatibility between dynamic range and detection accuracy, and the difficulty of optical free-form surface detection, so as to solve the problem of wavefront aberration measurement , Increase the dynamic range of detection and ensure the effect of detection accuracy

Active Publication Date: 2021-10-15
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] The purpose of the present invention is to provide an optical free-form surface full-band aberration detection system and detection method to solve the contradiction between the dynamic range and detection accuracy in the optical free-form surface detection and the detection difficulties of the optical free-form surface

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  • An optical free-form surface full-band aberration detection system and detection method
  • An optical free-form surface full-band aberration detection system and detection method
  • An optical free-form surface full-band aberration detection system and detection method

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specific Embodiment approach 1

[0025] Specific implementation mode 1. Combination Figure 1 to Figure 7 In this embodiment, a full-frequency aberration detection system for an optical free-form surface includes a mid-high frequency aberration detection system A1 and a low-frequency aberration detection system A2;

[0026] The middle and high frequency aberration detection system A1 includes a mirror to be tested Q1, a luminous screen Q2 and a CCD camera Q3; the low frequency aberration detection system A2 includes an imaging lens Q7, a beam splitting prism Q8, an adjustable diaphragm Q9, a fiber laser, and an imaging The lens Q11 is an imaging lens, a camera Q12 and an electric translation stage Q13; the light emitted by the luminous screen Q2 is received by the CCD camera Q3 through the reflector of the mirror Q1 to be measured, and the image obtained by the CCD camera Q3 is processed by the computer Q14 to obtain Surface shape information of the mirror Q1 to be tested.

[0027] The light emitted from the...

specific Embodiment approach 2

[0053] Specific Embodiment 2. This embodiment is a detection method for a full-band aberration detection system of an optical free-form surface described in Specific Embodiment 1. The method is implemented by the following steps:

[0054] Step 1. Build and adjust the middle and high frequency aberration detection system A1 and the low frequency aberration detection system A2;

[0055] Step 2, using the adjusted middle and high frequency band aberration detection system A1 and low frequency aberration detection system A2 to collect the image information of the mirror Q1 to be tested respectively;

[0056] Step 3: Using the computer Q14 to process the collected image information with the aberrations in the middle and high frequency bands and low frequency bands respectively, to obtain the surface shape information of the mirror Q1 to be tested.

[0057] In this embodiment, the computer-aided inverse Hartmann detection method with relatively accurate measurement of middle and hig...

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Abstract

An optical free-form surface full-band aberration detection system and detection method relate to the field of optical free-form surface detection and solve the contradiction between dynamic range and detection accuracy in existing optical free-form surface detection and the detection difficulties of optical free-form surface. It includes a mid-to-high frequency aberration detection system and a low-frequency aberration detection system; the mid-to-high frequency aberration detection system includes a mirror to be tested, a luminescent screen, and a CCD camera; the CCD camera includes a focal plane, a camera lens, and a pinhole; the low-frequency aberration The detection system includes an imaging lens, a beam splitting prism, an adjustable aperture, a fiber laser, a converging lens, an imaging camera, and a motorized translation stage; the invention adopts a computer-aided reverse Hartmann measurement method and a phase recovery method, and has high measurement accuracy , the dynamic range of the measurement slope is large, and the spatial resolution is high, and it can measure the large numerical slope problem that cannot be measured by the interferometer and the Hartmann detection.

Description

technical field [0001] The invention relates to the field of optical free-form surface detection, in particular to a high-precision, large measurement range, simple structure, low-cost, full-band aberration detection system and method for optical free-form surfaces. Background technique [0002] Compared with traditional spherical and aspherical surfaces, optical free-form surfaces have greater freedom in aberration correction and control of light direction, and can simplify the optical system, making it more compact and having higher optical performance. Since the optical free-form surface is a kind of non-axisymmetric, irregular, and random-structured surface, its shape is relatively complex, and its precision requirements are high. It does not have a clear reference plane. Therefore, can the reference surface and measurement surface of the optical free-form surface be realized? The optimal matching problem between optical free-form surfaces is the key to the detection of ...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24
CPCG01B11/24
Inventor 马鑫雪王建立刘欣悦王斌
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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