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Method, non-volatile memory and control device

A coating, layer stacking technology, applied in the field of non-volatile memory and control equipment, can solve the problems of manual recalibration, unsure of the results of compensation calculations, high cost, etc., to reduce complexity, reduce quantity, simplify Effects of control and/or regulation

Active Publication Date: 2019-07-26
VON ARDENNE ASSET GMBH & CO KG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] This approach, although reducing the risk of simulation failure, moves the overhead from the calculation side to the measurement side, so that the associated overhead still results in high costs
Due to the complex calculations, an automated adjustment of the coating system cannot be carried out easily either, since the results of the compensation calculations cannot be assured
Therefore, quality assurance can only be implemented with extensive knowledge and long-term experience and must be continuously manually recalibrated and / or verified

Method used

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  • Method, non-volatile memory and control device

Examples

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example 1

[0226] Example 1 is a method 100, 300 for coating a substrate, wherein the substrate has one or more than one substrate, and wherein the method 100, 300 has: Form 1001 a first layer stack on the object; detect 301 the first spectrum of the first layer stack; change 305 at least one adjustment parameter to adjust at least one coating process in a plurality of coating processes; by using the changed at least one adjustment parameter in Forming 1007 a second layer stack on a substrate of a plurality of coating processes; detecting 303 a second spectrum of the second layer stack; determining 307 a model, wherein the model provides a relationship between changes in at least one adjustment parameter and the two spectra relative to each other Bijective (for example linear) mapping function between deviations; form 101 a third layer stack on a substrate by means of multiple coating processes; detect 103 a third spectrum of the third layer stack; determine 105 for Change to be performe...

example 2

[0227] Example 2 is a method 100, 300 according to example 1, wherein in determining 307 the model, the two spectra have a first spectrum and a second spectrum.

example 3

[0228] Example 3 is a method 100, 300 according to example 1 or 2, wherein in determining 105 the change to be performed, the two profiles have a third profile and a desired profile, wherein optionally the desired profile has a first profile and / or second spectrum.

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Abstract

The invention relates to a method, a non-volatile memory and a control device. According to different embodiments, the method (100) for coating comprises: forming (101) a first layer stack on a firstsubstrate (112) by means of a multiplicity of coating processes, each coating process of which forms at least one layer of the first layer stack; detecting (103) an optical spectrum of the first layerstack; determining (105) correction information for at least one coating process of the multiplicity of coating processes using a model, wherein the model provides a right-unique mapping function between a deviation of the spectrum from a desired spectrum and the correction information; and changing (107) at least one control parameter for controlling the at least one coating process of the multiplicity of coating processes using the correction information; and forming (109) a second layer stack on the first or a second substrate (112) by means of the multiplicity of coating processes using the changed control parameter, each coating process of which forms at least one layer of the second layer stack.

Description

technical field [0001] The invention relates to a method, a non-volatile memory and a control device. Background technique [0002] In general, the optical properties of transparent supports such as glass disks, films etc. can be changed by means of coating. Traditionally, for example, window panes are equipped with coatings which reflect infrared light as much as possible and at the same time have a certain aesthetic or optical transparency. The balance between the transparency and the reflective properties of eg coated glass panes results in complex parameter dependencies, especially when layer systems are used which have a plurality of layers arranged one above the other. In addition to the optical material properties, the angular dependence of the optical properties and the scattering relationship can also be taken into account. Therefore, various layer systems have been developed which are adapted to the specific purpose of use. [0003] Rising demands for cost reduc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/54C03C17/09C03C17/34
CPCC23C14/54C03C17/09C03C17/34C23C16/545C23C16/52C23C14/562C23C14/547C23C14/52G06F9/30043G06T17/05
Inventor 斯特芬·莫斯哈默
Owner VON ARDENNE ASSET GMBH & CO KG
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