Optical filter and optical device using same

Abstract

The present invention provides an optical filter and an optical device using same, the optical filter comprising: a cladding layer; a plurality of metallic patterns regularly patterned on the claddinglayer; and an optical waveguide layer formed over the plurality of metallic patterns, wherein light proceeds from the optical waveguide layer to the cladding layer.

Description

technical field [0001] The present invention relates to an optical filter, and more particularly, to an optical filter and an optical device having an optical waveguide layer formed on a plurality of metal patterns. Background technique [0002] An optical filter is a configuration necessary to filter light having various wavelengths into an arbitrary wavelength band. Optical filters are used to configure miniature spectrometers since optical filters that transmit only light of a specific wavelength band or transmit light of different wavelength bands are integrated in an array. As a bandpass filter, a Fabry-Perot filter using the light interference effect of a dielectric resonator placed between two reflective films is typical. In addition, a transmission filter using an extraordinary optical transmission (EOT) phenomenon occurring in a nanohole array structure periodically arranged on a metal thin film structure is used. [0003] The advantage of the Fabry-Perot filter u...

AI Technical Summary

Problems solved by technology

[0003] The advantage of the Fabry-Perot filter using the optical interference effect is that it is relatively easy to control the transmission center wavelength and transmission bandwidth, but the disadvantage is that the formation of multiple transmission bands limits the free spectral range and has a high incidence angle dependence

Unlike the Fabry-Perot filter, the advantage of the metal nanohole array structure is that the central transmission wavelength can only be changed by controlling the horizontal lattice structure, but the disadvantage is that it has a wide bandwidth and due to the relationship between the surface plasmon wave and the lattice mode. Various transmission modes are generated by the coupling between them, making the out-of-band suppression characteristics poor

[0005] This LVF has limitations in process reproducibility due to the linear structure whose thickness varies in the length direction

In addition, since the resolution of a conventional LVF spectrometer is determined by the height-length ratio of the LVF, it is difficult to reduce the size of the spectrometer

In particular, due to the linear structure, insufficient process compatibility with 2D imaging sensor technology is disadvantageous in terms of productivity

[0006] Since the transmission spectrum at each LVF position consists of a continuous spectral overlap, and the integration between the LVF and the optical detector is not monolithic, there is a distance between the filter and the optical detector array and, accordingly, a defect: filtering The performance of the device is deteriorated due to stray light effects

However, when the spectrometer is operating, the presence of multiple modes can lead to distortion during signal processing

[0008] In addition, since the half width is large and the dependence on the angle of incidence is high, there are many limitations in satisfying various demands on optical filters

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