based on vo 2 Preparation method of thin-film thermochromic intelligent thermal control device

A thermochromic and VO2 technology, applied in the direction of vanadium oxide, etc., can solve the problems of high-temperature reflection and low high-temperature emissivity of the film, and achieve the goal of increasing thermal load, low-temperature emissivity, and increasing the change value of infrared emissivity Effect

Active Publication Date: 2020-11-13
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The present invention will solve existing VO 2 The reflection of the film at high temperature is higher, resulting in a VO-based 2 The problem of low high-temperature emissivity of smart thermal control devices, while providing VO-based 2 Thin-film thermochromic intelligent thermal control device and preparation method thereof

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  • based on vo <sub>2</sub> Preparation method of thin-film thermochromic intelligent thermal control device
  • based on vo <sub>2</sub> Preparation method of thin-film thermochromic intelligent thermal control device

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specific Embodiment approach 1

[0033] Specific implementation mode 1: This implementation mode is based on VO 2 The thin-film thermochromic intelligent thermal control device consists of a highly reflective metal base layer, a micro-nano structure VO from bottom to top 2 layer and protective layer composition;

[0034] The micro-nano structure VO 2 The layer is composed of a plurality of micro-nano structural units, and the plurality of micro-nano structural units are uniformly arranged on the upper surface of the highly reflective metal base layer; the shape of the micro-nano structural units is conical, cylindrical or cuboid; when When the shape of the micro-nano structural unit is conical, the diameter of the conical bottom surface is 100nm-1000nm, the height is 20nm-1000nm, the cone angle is 10°-120°, and the adjacent micro-nano structural units are closely arranged; when the said When the shape of the micro-nano structural unit is cylindrical, the diameter of the cylindrical shape is 100nm-1000nm, th...

specific Embodiment approach 2

[0037] Specific embodiment 2: The difference between this embodiment and specific embodiment 2 is that the highly reflective metal base layer is Al, Au, Ag, Mg, Ni, Zn or Cu; the protective layer is Al 2 o 3 , SiO 2 , ZrO 2 , Nb 2 o 5 or HfO 2 , the upper surface of the protective layer and the micro-nano structure VO 2 The distance between the upper surfaces of the layers is 20nm-200nm. Others are the same as in the second embodiment.

[0038] The highly reflective metal base layer described in this embodiment is infrared highly reflective metal.

specific Embodiment approach 3

[0039] Specific implementation mode three: this implementation mode is based on VO 2 The preparation method of the thermochromic intelligent thermal control device of the film is carried out according to the following steps:

[0040] 1. Clean the substrate:

[0041] Electropolishing is used to polish the surface of the highly reflective metal base layer until the reflectance of the polished high reflective metal base layer in the infrared band of 2.5 microns to 25 microns reaches more than 0.7, and the pretreated metal base layer is obtained;

[0042] 2. VO 2 Film preparation:

[0043] When the frequency is 50Hz~500Hz, the pulse width is 40 microseconds~500 microseconds, the power is 50W~500W, the voltage is 100V~1000V, the temperature is 300℃~450℃, the pressure is 1Pa~2Pa, and the argon gas flow rate is 80sccm~ Under the conditions of 200 sccm and oxygen flow rate of 2 sccm ~ 10 sccm, deposit VO on the surface of the pretreated metal base layer 2 film;

[0044] 3. Micro-...

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Abstract

The invention provides a thermochromic intelligent thermal-control device based on a VO2 film and a preparation method of the thermochromic intelligent thermal-control device, and belongs to the fieldof preparation of intelligent material micro-nano-structure devices. The invention aims to solve the problems that an existing VO2 film is high in reflection at high temperature, and thus, the high-temperature emissivity of the intelligent thermal-control device based on VO2 is low. The thermochromic intelligent thermal-control device based on the VO2 film successively consists of a high-reflection metal substrate layer, a micro-nano-structure VO2 layer and a protecting layer from bottom to top; or the thermochromic intelligent thermal-control device based on the VO2 film successively consists of a semiconductor substrate layer, an infrared high-reflection layer, a micro-nano-structure VO2 layer and a protecting layer from bottom to top. The preparation method comprises the following steps: one, cleaning a substrate; two, preparing the VO2 film; three, processing a micro-nano structure; and four, depositing the protecting layer. The invention is used for the thermochromic intelligentthermal-control device based on the VO2 film and preparation of the thermochromic intelligent thermal-control device.

Description

technical field [0001] The invention belongs to the field of preparation of smart material micro-nano structure devices. Background technique [0002] VO 2 It is a thermochromic material, and its optical properties can change significantly when the temperature changes. The specific performance is: at low temperature, VO 2 The film is highly transparent in the infrared band; at high temperature, the infrared light is absorbed by VO 2 Thin film reflection. VO 2 This unique optical property is ideal for temperature-adaptive smart materials. will VO 2 The thin film is deposited on a highly reflective substrate in the infrared band, and it transmits VO at low temperature 2 The light in the infrared band of the film is reflected by the substrate, and the substrate and VO 2 At this time, the device composed of thin film is highly reflective in the infrared band, showing low emissivity; at high temperature, VO 2 The film is highly reflective of infrared, and infrared light c...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01G31/02
CPCC01G31/02
Inventor 李垚豆书亮赵九蓬任飞飞张伟岩李龙
Owner HARBIN INST OF TECH
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