A substrate supporting member and a substrate conveying device

A substrate support and conveying device technology, which is applied to electrical components, conveyor objects, transportation and packaging, etc., can solve the problems of difficult support height, heavy workload, and difficult adjustment, so as to improve the adjustment difficulty and reduce the Workload and the effect of improving yield

Inactive Publication Date: 2018-12-18
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] At present, the height of the supports used in the substrate cleaning machine before film formation needs to be manually adjusted one by one. During the adjustment process, not only the workload is heavy, the adjustment is difficult, but it is also difficult to ensure that the height of each support is exactly the same. If the height of the support is not adjusted properly, it will cause abnormalities such as water residue on the substrate

Method used

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  • A substrate supporting member and a substrate conveying device
  • A substrate supporting member and a substrate conveying device
  • A substrate supporting member and a substrate conveying device

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Embodiment Construction

[0012] This application provides a substrate support and a substrate transfer device. In order to make the purpose, technical solution and technical effect of this application clearer and clearer, the following will further describe this application in detail. It should be understood that the specific implementation regulations described here are only for explanation This application is not intended to limit this application.

[0013] Substrate supports are generally included in substrate transfer and processing equipment to assist in supporting the substrate during substrate transfer processing. Such as figure 1 as shown, figure 1 It is a structural schematic diagram of the substrate support in the prior art. The height of the substrate support in the prior art needs to be manually adjusted. Specifically, the substrate support includes a base 11, a first connecting rod 12, and a second connecting rod 13 , guide wheel 14, wherein the first connecting rod 12 and the second co...

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Abstract

A substrate supporting member and a substrate conveying device are disclosed. The substrate supporting member includes a base; a bracket comprising a first connecting rod and a second connecting rod,one end of the first connecting rod being fixed on the base, the other end of the first connecting rod and one end of the second connecting rod being movably connected with each other through a rotating mechanism, so that the second connecting rod moves relative to the first connecting rod taking the rotating mechanism as an axis; and a guide wheel rotatably connected with the other end of the second connecting rod. In this way, the height adjustment difficulty of the guide wheel is improved, the workload of the adjustment personnel is reduced, and the yield of the substrate is improved.

Description

technical field [0001] The present application relates to the field of display panel fabrication, in particular to a substrate support and a substrate transfer device. Background technique [0002] During the transfer of the substrate, when the distance between the front and rear transfer wheels is relatively large, in order to reduce the deformation and warpage of the substrate, a support is often required to assist in the gap between the transfer wheels. [0003] At present, the height of the supports used in the substrate cleaning machine before film formation needs to be manually adjusted one by one. During the adjustment process, not only the workload is heavy, the adjustment is difficult, but it is also difficult to ensure that the height of each support is exactly the same. If the height of the support is not adjusted properly, it will cause abnormalities such as water residue on the substrate. Contents of the invention [0004] The technical problem mainly solved ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677H01L21/687
CPCH01L21/67703H01L21/68714H01L21/68764
Inventor 赵进飞
Owner WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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