Parameter amplification method in tunable grid structure micro mechanical gyroscope, and device thereof

Abstract

The invention discloses a parameter amplification method in a tunable grid structure micro mechanical gyroscope, and a device thereof. The method comprises the following five steps: driving signal production, tuning signal production, tuning signal amplification, displacement detection, and amplitude and phase extraction; the device comprises a tunable micro mechanical gyroscope, a driving signalproducing circuit, a capacitor / voltage conversion circuit, a tuning signal amplification circuit, a first digital-to-analog converter (DAC), an ADC, a second DAC and a field programmable gate array chip. The tuning structure is realized by utilizing a variable-area type triangular electrode without importing soft spring effect; a tuning voltage signal in a radical form is produced by utilizing thefield programmable gate array chip, the DC tuning capacity and the parameter amplification can be separately arranged. The method can be applied to the driving modal or detection modal of the micro mechanical gyroscope, and can be applied to the micro mechanical resonator of other types.

Description

technical field [0001] The invention relates to a micromechanical gyroscope, in particular to a parameter amplification method and a device thereof in a micromechanical gyroscope with an adjustable grid structure. Background technique [0002] Micromechanical gyroscopes have the characteristics of small size, low power consumption, and mass production, and have broad application prospects in industrial and civil fields. In recent years, the performance indicators of micromachined gyroscopes have been continuously improved, showing the potential of high-precision applications, such as inertial navigation units. [0003] The principle of parameter amplification is the periodic change of the elastic coefficient. Under certain parameters, it can offset part of the damping coefficient, which will lead to the amplification of the quality factor of the device and improve the mechanical sensitivity of the device. Micromechanical gyroscopes, also known as Coriolis vibrating gyroscop...

AI Technical Summary

Problems solved by technology

In addition, there are generally three forms of traditional parametric amplification tuning signals: V t =V ac cos(ωt), V t =V dc +V ac cos(ωt), V t =V dc +V ac cos(2ωt), none of these three forms can directly adjust the parameter V dc and V ac Set DC tuning capability and parameter amplification capability separately

Images