Parameter amplification method in tunable grid structure micro mechanical gyroscope, and device thereof

A technology of micromechanical gyroscope and parameter amplification, which is applied in the direction of measuring device, gyro effect for speed measurement, gyroscope/steering sensing equipment, etc., to achieve the effect of improving sensitivity

Active Publication Date: 2018-12-18
ZHEJIANG UNIV
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

In addition, there are generally three forms of traditional parametric amplification tuning signals: V t =V ac cos(ωt), V t =V dc +V ac cos(ωt), V t =V dc +V ac cos(2ωt), none of these three forms can directly adjust the parameter V dc and V ac Set DC tuning capability and parameter amplification capability separately

Method used

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  • Parameter amplification method in tunable grid structure micro mechanical gyroscope, and device thereof
  • Parameter amplification method in tunable grid structure micro mechanical gyroscope, and device thereof
  • Parameter amplification method in tunable grid structure micro mechanical gyroscope, and device thereof

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Embodiment Construction

[0032] Such as figure 1 As shown, the steps of the parametric method in the tunable grid structure micromachined gyroscope are as follows:

[0033] 1) The driving signal generation module uses the field programmable gate array chip to generate the AC driving signal and the carrier signal, uses the reference voltage chip to generate the DC driving signal, and adds the AC driving signal and the DC driving signal through the operational amplifier chip of the driving signal generating circuit The subtraction generates two driving signals. The form of the two drive signals is V d =V d-DC ±V d-AC cos(ωt), where V d-AC is the driving DC component, V d-AC For the driving AC amplitude, ω is the driving frequency. The driving AC amplitude and driving frequency can be adjusted in real time by serial port communication to the parameters in the field programmable gate array chip. When the driving frequency increases at a fixed interval within a certain frequency range, the frequency ...

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Abstract

The invention discloses a parameter amplification method in a tunable grid structure micro mechanical gyroscope, and a device thereof. The method comprises the following five steps: driving signal production, tuning signal production, tuning signal amplification, displacement detection, and amplitude and phase extraction; the device comprises a tunable micro mechanical gyroscope, a driving signalproducing circuit, a capacitor / voltage conversion circuit, a tuning signal amplification circuit, a first digital-to-analog converter (DAC), an ADC, a second DAC and a field programmable gate array chip. The tuning structure is realized by utilizing a variable-area type triangular electrode without importing soft spring effect; a tuning voltage signal in a radical form is produced by utilizing thefield programmable gate array chip, the DC tuning capacity and the parameter amplification can be separately arranged. The method can be applied to the driving modal or detection modal of the micro mechanical gyroscope, and can be applied to the micro mechanical resonator of other types.

Description

technical field [0001] The invention relates to a micromechanical gyroscope, in particular to a parameter amplification method and a device thereof in a micromechanical gyroscope with an adjustable grid structure. Background technique [0002] Micromechanical gyroscopes have the characteristics of small size, low power consumption, and mass production, and have broad application prospects in industrial and civil fields. In recent years, the performance indicators of micromachined gyroscopes have been continuously improved, showing the potential of high-precision applications, such as inertial navigation units. [0003] The principle of parameter amplification is the periodic change of the elastic coefficient. Under certain parameters, it can offset part of the damping coefficient, which will lead to the amplification of the quality factor of the device and improve the mechanical sensitivity of the device. Micromechanical gyroscopes, also known as Coriolis vibrating gyroscop...

Claims

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Application Information

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IPC IPC(8): G01C19/5776
CPCG01C19/5776
Inventor 林一羽郑旭东金仲和马志鹏
Owner ZHEJIANG UNIV
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