Vacuum laser sealing welding tool and vacuum laser sealing machine

Abstract

The invention provides a vacuum laser sealing welding tool and a vacuum laser sealing machine. The vacuum laser sealing tool comprises a sealing welding plate and a magnetic attraction plate, a plurality of workpiece mounting grooves are formed in the sealing welding plate, openings of the workpiece mounting groove faces upwards, and workpiece bases are installed in the workpiece mounting grooves;a plurality of magnetic attraction pieces are arranged on the magnetic attraction plate, the magnetic attraction plate is detachably arranged below the sealing welding plate, and the center positionsof the magnetic attraction pieces correspond to the center positions of the workpiece mounting grooves in a one-to-one correspondence mode; and when workpiece cover plates are installed above the workpiece bases, the magnetic attraction pieces can attract the workpiece cover plates so that the workpiece cover plates can be fixed on the workpiece bases. According to the vacuum laser sealing welding tool, the center positions of the magnetic attraction pieces arranged in the magnetic attraction plate correspond to the center positions of the workpiece mounting grooves in a one-to-one mode, so that when the workpiece cover plates are installed above the workpiece bases, the magnetic attraction force generated by the magnetic attraction pieces enables the workpiece cover plates to be tightlyfixed to the workpiece bases, and then the workpiece bases and the workpiece cover plates can be directly conveyed into a vacuum chamber for vacuum laser sealing welding.

Description

technical field [0001] The invention relates to the technical field of sealing and welding equipment, in particular to a vacuum laser sealing and welding tool and a vacuum laser sealing and welding machine. Background technique [0002] Quartz crystal resonators are one of the key components of various communication electronic digital products. In recent years, with the development of intelligent communication and various digital technologies, there are more and more smart electronic products for people's livelihood consumption, which also drives its supporting There is a huge demand for the key components of quartz crystal resonators. The traditional packaging methods of quartz crystal resonators are parallel resistance welding or low-temperature glass welding. In recent years, laser welding has begun to introduce crystal resonators due to its low cost and high efficiency. Cover and base package manufacturing field. However, the vacuum laser sealing and welding of the base...

AI Technical Summary

Problems solved by technology

However, due to the large size tolerance of the fixture position hole, the cover plate is more offset relative to the base after laser sealing and welding, and the outer dimension of the product has a larger deviation, the application of this fixing method is limited.

The other is to use pressure claws or spring columns to press the cover plates one by one, and use a set of laser sealing welding system to perform diagonal spot welding or pre-weld half of the cover plate in a nitrogen environment, and then send it into the vacuum chamber for further processing. The whole periphery of the cover plate and the base is laser welded. This fixing method requires two sets of laser sealing and welding systems for sealing and welding. The equipment is complicated and the cost is high.

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