Coplanar differential pressure sensor

Abstract

The invention discloses a coplanar differential pressure sensor, and relates to the technical field of pressure sensing. The coplanar differential pressure sensor comprises a sensor body, pressure sensing faces and a chip assembly. The sensor body is provided with a lower end face; two grooves are formed in the lower end face; and the pressure sensing faces comprise the first pressure sensing faceand the second pressure sensing face which are arranged in the grooves correspondingly and used for sensing fluids with different pressures. The chip assembly is provided with a sensor chip; the sensor chip is provided with a positive pressure end and a negative pressure end; the positive pressure end communicates with the first pressure sensing face to detect the pressure sensed by the first pressure sensing face; and the negative pressure end communicates with the second pressure sensing face to detect the pressure sensed by the second pressure sensing face. By arranging the mutually coplanar pressure sensing faces on the sensor body, the pressure error caused by the fact that as for a traditional differential pressure sensor, the pressure sensing faces are not on the same plane is avoided, and the accuracy of a measurement result is guaranteed.

Description

technical field [0001] The present application relates to the technical field of pressure sensing, in particular to a coplanar differential pressure sensor. Background technique [0002] A differential pressure sensor is a sensor used to measure the difference between two pressures, usually used to measure the pressure difference between the front and rear ends of a device or component. A known differential pressure sensor structure, such as a piezoresistive differential pressure sensor, generally includes two pressure-sensing surfaces, which are oppositely arranged at both ends of the differential pressure sensor. The pressure is transmitted to the upper and lower ends of the sensor chip without damage, the sensor chip generates stress and strain and causes the resistance value of its internal bridge to change, and then the bridge circuit obtains the corresponding voltage output signal and outputs it to the external instrumentation through the circuit board . [0003] For...

AI Technical Summary

Problems solved by technology

The pressure-sensing surface is set at both ends of the differential pressure sensor body, and the pressure chamber between the pressure-sensing surface and the sensor chip is filled with a pressure-guiding medium (specifically, silicone oil). Apply a pressure, but because the two pressure-sensitive surfaces are not on the same plane, there is a pressure difference in the pressure applied to the sensor chip, which will cause errors in the measurement results and affect the accuracy of the measurement results

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