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Target material suspension mechanism and ion sputtering coating device

A technology of suspension mechanism and coating equipment, applied in the field of optical communication components, can solve the problem of inconvenient operation of the target suspension mechanism, and achieve the effects of preventing water leakage and air leakage, good effect and improving use effect.

Pending Publication Date: 2018-11-27
苏州浩联光电科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] One of the objects of the present invention is to provide a target suspension mechanism, which aims to solve the problem of inconvenient operation of the target suspension mechanism in the prior art;
[0006] Another object of the present invention is to provide an ion sputtering coating equipment, which aims to solve the problem of inconvenient operation of the target suspension mechanism in the prior art

Method used

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  • Target material suspension mechanism and ion sputtering coating device
  • Target material suspension mechanism and ion sputtering coating device
  • Target material suspension mechanism and ion sputtering coating device

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Embodiment

[0045] This embodiment provides an ion sputtering coating device 15, the specific structure of which is described below.

[0046] Please refer to figure 1 , with reference to Figure 2 to Figure 11 , The ion sputtering coating equipment 15 includes a first target 10, a second target 11, a sputtering ion source 12, a film thickness correction device 13, a workpiece to be processed 14, a support platform and the above target suspension mechanism 1; The ion source 12, the target material suspension mechanism 1, the film thickness correction device 13 and the workpiece 14 to be processed are all arranged on the support platform at intervals; the first target material 10 is connected to the first connecting hole 6 by installing a plurality of screws One end of the water separation flange 2 is connected, and the second target 11 is connected with the other end of the water separation flange 2 by installing a plurality of screws in a plurality of second connection holes 7; the sputt...

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Abstract

The invention provides a target material suspension mechanism and an ion sputtering coating device, and belongs to the technical field of components for optical communication. The device comprises a water diversion flange, a water passing column and an upper flange; the central part of the water diversion flange is provided with a mounting through hole, one end of the water passing column is connected with the mounting through hole, and the other end is connected with the upper flange; one end of the water diversion flange is provided with a plurality of first connecting holes, and the other end of the water diversion flange is provided with a plurality of second connecting holes. The ion sputtering coating device is provided with the target material suspension mechanism, so that the filmthickness uniformity of the surface of a work piece is good and the yield is high.

Description

technical field [0001] The invention relates to the technical field of optical communication components, in particular to a target suspension mechanism and ion sputtering coating equipment. Background technique [0002] Ion beam sputtering coating equipment is the necessary equipment for the production of wavelength division multiplexing filters for optical communication components. In the structure of this equipment, the target suspension mechanism as the core layout usually adopts the following layout: its main structure includes Target suspension mechanism, ion source, product to be processed (round shape) and film thickness correction device; the distance between the target center of the target suspension mechanism and the ion source is 260mm-280mm, which is the key distance. [0003] Brief description of the principle of ion beam sputtering: After the ion beam is generated by the ion source, the high-energy ion beam hits the target, and the target particles are sputtere...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/46
CPCC23C14/46
Inventor 周予坤王安平
Owner 苏州浩联光电科技有限公司
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