A Method for Approximating the Geometric Symmetry of a Multi-DOF Electrostatic Levitation System

Abstract

The invention provides a geometric symmetry approximation method of a multi-degree-of-freedom electrostatic suspension system based on iterative adjustment. In the method, horizontally moving-rotatingmulti-degree-of-freedom system is regarded as a plurality of independent translational freedom degrees, and a variable pre-load voltage method is adopted for carrying out sequential and circular iterative adjustment on the symmetry of each degree of freedom. A multi-degree-of-freedom suspension body can be adjusted to the geometric symmetry center of an electrode cage only through limited times of iteration. According to the invention, the influence of coupling force between multiple degrees of freedom can be overcome, and the whole process can be complete automatically. The method can be widely applied to high-precision sensing and ultra-precision vibration reduction control based on electrostatic suspension technology, so that the system has self-calibration and environment-adaptive capacity and the system can be retained at the optimal working point. In this way, precise instruments and the precise equipment can be ensured to play the required performance.

Description

technical field [0001] The invention relates to a method for approximating the geometric symmetry of a multi-degree-of-freedom electrostatic suspension system based on iterative adjustment, which is used for adjusting the multi-degree-of-freedom suspension to the geometric symmetry center of an electrode cage, and belongs to the technical field of electrostatic suspension control and precision sensing. Background technique [0002] The electrostatic levitation system has important applications in the fields of gravity satellites and space-based vibration reduction. It uses the precise and easy-to-control electrostatic force without mechanical contact to suspend and isolate the levitation body (generally sensitive masses, working platforms, etc.) in six degrees of freedom. The detection performance of the sensor (such as the electrostatic levitation accelerometer) is more sensitive or the working environment of the work platform (such as the space-based ultra-quiet platform ba...

AI Technical Summary

Problems solved by technology

[0004] The technical problem of the present invention is: to overcome the deficiencies of the prior art, to propose a geometric symmetry approximation method based on iterative adjustment of the multi-degree-of-freedom electrostatic levitation system, and to solve the problem of applying the single-degree-of-freedom symmetry adjustment method to the multi-degree-of-freedom system coupling misalignment problem

Images