Device for rapidly measuring surface flatness of object

Abstract

A device for rapidly measuring the surface flatness of an object of the invention belongs to the technical field of optical inspection and testing of industrial production machinery. The device is composed of an illumination imaging module and a motion mechanism; the illumination imaging module is composed of an illumination system and an imaging system; in the illumination system, a laser, a beamsplitter, an objective lens and a measured object are sequentially arranged along the light propagation direction; in the imaging system, an object to be tested, an objective lens, a beam splitter, an attenuator, a pinhole and an image sensor are sequentially arranged along the light propagation direction; the moving mechanism consists of an upper fixed end, an upper rod, a moving block, a lowerrod, a lower fixed end, a motor, a coupling, a T type turntable and a limit protrusion; when the motion block is in motion, a beam emitted by the laser is defocused to the surface of the object to betested, and a beam reflected by the object to be tested is defocused onto the pinhole. The device not only can qualitatively detect the surface flatness of the object, but also is simple in operationprocess and easy in operation method, and can filter or monitor the noise, and the detection result is accurate.

Description

technical field [0001] The device for quickly measuring the flatness of an object surface according to the invention belongs to the technical fields of industry, production, machinery, optics, detection, testing and the like. Background technique [0002] Flatness measurement refers to the variation of the measured actual surface to its ideal plane. [0003] The flatness error is to compare the measured actual surface with the ideal plane, and the line value distance between the two is the flatness error value; or by measuring the relative height difference of several points on the actual surface, and then converting it to the line value Flatness error value. [0004] The common methods of flatness error measurement are as follows: [0005] 1. Flat crystal interferometry: use the working surface of the optical flat crystal to reflect the ideal plane, and directly determine the flatness error value of the measured surface by the curvature of the interference fringes. [00...

AI Technical Summary

Problems solved by technology

[0011] The above methods are mature and can achieve precise measurement, but the theoretical basis is too professional and requires professionals to operate and measure. Moreover, the lack of effective suppression methods for the noise in the measurement process also affects the measurement accuracy to a certain extent.

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