Graphene oxide standard leak and graphene oxide helium permeating component

Abstract

The invention discloses a graphene oxide standard leak and a graphene oxide helium permeating component. The standard leak has graphene oxide as a permeating material. The graphene oxide helium permeating component includes a lengthwise cylinder and an internal overlapped structure. The two ends of the lengthwise cylinder are perforated and are provided with a front discharge support structure anda rear discharge support structure which are of a silk screen structure. The internal overlapped structure includes a front filtering net, an O-shaped seal ring, a graphene oxide film assembly, an O-shaped seal ring, and a rear filtering net, wherein the front filtering net and the rear filtering net have the same structure, and the internal overlapped structure is a symmetrical structure with the graphene oxide film assembly as the center. According to the invention, leaks with an extreme low leak rate at 10-15Pa.m / s and an extreme high leak rate at 10-3Pa.m / s can be obtained, has the advantages of wide range and small influence imposed by temperature changes. Also, standard leaks with high stability can be researched and manufactured, and uncertainty in the measurement process can be reduced.

Description

technical field [0001] The invention relates to the technical field of vacuum leak detection. Specifically, the invention relates to a leak hole part and a manufacturing method thereof, and also discloses a permeable standard leak hole. Background technique [0002] At present, for vacuum electronic devices, airtightness is directly related to its vacuum life, so vacuum electronic devices have very strict requirements on airtightness. With the continuous development of electronic technology, the size of vacuum electronic devices is getting smaller and smaller, and the life expectancy is getting longer and longer, which puts forward higher requirements for sealing performance. For example, a new type of vacuum electronic device requires a leak rate index better than 3×10 -14 Pa·m 3 / s, in order to accurately measure the leak rate, the sensitivity of the leak detection system is required to be better than 3×10 -15 Pa·m 3 / s. High sealing requirements The leak detection wo...

AI Technical Summary

Problems solved by technology

It is difficult to accurately control the size of the standard leak hole in the manufacturing process of this kind of leak, and the controllability of the leak rate is poor, which is not conducive to large-scale industrial production.

[0006] As mentioned above, the upper and lower limits of the leak rate of the currently used standard leak hole conduction type and quartz helium-infiltration type standards cannot meet the needs of current industrial production. In view of this, it is necessary to provide a standard leak hole with a wide range of leak rate , can realize the advantages of extremely small leak rate and extremely large leak rate measurement

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