A device and method for large-aperture collimation wavefront error detection with real-time compensation
A real-time compensation and wavefront error technology, applied in the field of optical detection, can solve the problems of inability to compensate system errors in real time, reduce system measurement accuracy, and reduce measurement accuracy, and achieve real-time system errors, improve measurement accuracy, and avoid system errors. Effect
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[0029] The present invention will be further described below in conjunction with accompanying drawing and example.
[0030] see figure 1 , a large aperture collimation wavefront error detection device with real-time compensation, comprising a beam sampling sub-device, a beam receiving sub-device and a beam compensating sub-device.
[0031] Said beam sampling sub-device consists of a pentaprism 5, a linear guide 6 and a second CCD8.
[0032] Said light beam compensating sub-device is made up of laser 1, beam splitter 3, the first CCD 2, right-angle prism 4 and the 3rd CCD9, and described beam splitter 3 is positioned at the emitting light path of laser 1, and the beam splitting surface of beam splitter 3 and light The axis forms an angle of 45 degrees, and the slope of the right-angle prism 4 is coated with a semi-transparent and semi-reflective film. The right-angle surface of the right-angle prism 4 is arranged perpendicular to the linear guide rail, and the right-angle surf...
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