Planar motor and driving method driven by quasi-Tazi-shaped piezoelectric vibrator

Abstract

The invention relates to the technology of multi-degree-of-freedom piezoelectric ultrasonic motors, in particular to a planar motor driven based on a piezoelectric vibrator shaped like a Chinese character tian and a drive method. The planar motor comprises a stator component, a rotor component, a support component and a pre-tightening component, wherein the quasi-tian-shaped stator component is adopted is connected with the support component through the pre-tightening component; the rotor component is connected with the stator component and the support component. The motor is used to compound a two-phase elliptic motion trail through exciting vibration or near resonance of three modes comprising out-of-plane first-order symmetric bending vibration of the quasi-tian -shaped stator component, left-and-right surrounding rod in-plane first-order bending vibration and front-and-back surrounding rod in-plane first-order bending vibration, so that the rotor component is pushed to alternately move along an x direction and a y direction. The micron-grade or even higher-accuracy-grade planar motion can be realized, motor output power and speed are greatly increased, so that the motor operates stably; the motor utilizes an in-plane drive foot to push the rotor component, so that a thin and planar design of the planar motor is realized.

Description

technical field [0001] The invention belongs to the technical field of multi-degree-of-freedom piezoelectric ultrasonic motors, and in particular relates to a planar motor and a driving method driven by a quasi-square piezoelectric vibrator. Background technique [0002] The planar motor can realize the direct drive of the planar motion device, and is an ideal driving part of the planar motion system. In order to promote the development of planar motor technology, in recent years, many countries have been committed to exploring and utilizing new functional materials and new physical effects, developing electromagnetic planar motors, electrostatic planar motors, microwave planar motors, photothermal planar motors, shape memory planar motors, New motors such as piezoelectric planar motors, among which electromagnetic planar motors and piezoelectric planar motors are relatively more realistic. However, although the planar electromagnetic motor can also realize two-dimensional ...

AI Technical Summary

Problems solved by technology

In general, due to the short development time, the inherent precision and fast response characteristics of piezoelectric planar motors are far from being brought into play, and the performance of the motors is still far from a wide range of engineering applications. It is extremely limited and cannot well meet the diverse needs of the application field, such as stability, fastness, accuracy, goodness, smallness, thinness, and lightness. Therefore, a new piezoelectric planar motor principle and structure was discovered, and the driving mechanism of the planar motor was deeply explored. More piezoelectric planar motor prototypes to enrich the types of planar motors have become an important research content in the field of piezoelectric planar motors

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