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Transfer roll for imprinting

A technology for transfer rollers and roller bodies, which is applied in the field of transfer roller bodies for embossing, and can solve the problems of time-consuming and labor-intensive manufacturing

Inactive Publication Date: 2017-02-22
SOKEN CHEM & ENG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] However, in this method, it is necessary to provide a chuck portion having a magnetic force in order to fix the film to which the resin template is attached, and thus it is time-consuming and laborious to manufacture the device.

Method used

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  • Transfer roll for imprinting
  • Transfer roll for imprinting

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0031] Next, a transfer roller body for imprinting formed according to a preferred embodiment of the present invention will be described with reference to the drawings.

[0032] The transfer roller body for imprinting of the present invention is a transfer roller body for imprinting in which a resin film substrate with a resin template having a fine concave-convex pattern formed on its surface is wound around the peripheral surface of the roller body. is that

[0033] By dividing the roll body into two, the roll body is composed of one split body and the other split body, and one side end of the resin film substrate is sandwiched by the first split body. Between the two split surfaces joined to the second split body, after the first split body and the second split body are integrated, the resin film base material is wound along the circumferential direction of the roll body. around.

[0034] Figure 1 ~ Figure 4 A transfer roller body 10 for imprint according to a preferred...

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Abstract

The present invention fixes a resin-made mold to the correct position on a roll by a convenient method, the roll being used in an imprinting device in a roll transfer system. In this transfer roll for imprinting, a resin film substrate to which a resin-made mold having a fine relief pattern formed on a surface thereof is affixed is wrapped around a peripheral face of a roll body, and the transfer roll for imprinting is characterized in that the roll body is divided in two and thereby configured from one divided body and another divided body, and the resin film substrate is wrapped around in the circumferential direction of the roll body after one end of the resin film substrate is sandwiched between divided faces joined together of the first divided body and the second divided body, and the first divided body and the second divided body are integrated.

Description

technical field [0001] The present invention relates to a transfer roller body for imprint used in an imprint apparatus. Background technique [0002] The so-called nanoimprint technology refers to a technique in which a template forming a concave-convex pattern is pressed onto liquid resin or the like on a substrate, and the pattern of the template is transferred to the resin. Concavo-convex patterns range from nanoscale patterns on the 10nm level to patterns on the order of 100μm, and can be used in various fields such as semiconductor materials, optical materials, memory media, micromachines, biology, and the environment. [0003] As devices used in this nanoimprint technology, there are so-called roll-to-plate devices that transfer the shape of a template on a roll to resin on a flat substrate, and devices that transfer the shape of a template on a roll to a resin on a flat substrate. An apparatus of a roll transfer method, such as a so-called roll-to-roll (roll to roll...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B29C59/04B29C33/38
CPCB29C33/38B32B37/0053B32B38/06B29C59/04B01D59/04G03F7/0002B29C2043/025B29C59/002B29C2059/023B29L2007/008
Inventor 水上裕
Owner SOKEN CHEM & ENG CO LTD
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