Running-form continuous large-scale graphene thin film preparation device

Abstract

The invention relates to a running-form continuous large-scale graphene thin film preparation device which comprises a high-temperature process cavity, a low-temperature cooling cavity A, a low-temperature cooling cavity B and a sample boat. Slide rails are horizontally and fixedly arranged along the middles of the two side inner walls of the low-temperature cooling cavity A, the high-temperature process cavity and the low-temperature cooling cavity B correspondingly. Pulley blocks corresponding to the slide rails are rotatably connected to the two sides of the sample boat. The sample boat slides along the slide rails through the pulley blocks on the two sides of the sample boat. A boat push device A and a boat push device B are arranged inside the low-temperature cooling cavity A and the low-temperature cooling cavity B correspondingly, wherein the boat push device A and the boat push device B are of the same structure. A sampling rod A and a sampling rod B are detachably connected to the boat push device A and the boat push device B correspondingly. The end, away from the boat push device A, of the sampling rod A can be driven by the boat push device A to be connected to or disconnected from the sample boat. The end, away from the boat push device B, of the sampling rod B can be driven by the boat push device B to be connected to or disconnected from the sample boat. The running-form continuous large-scale graphene thin film preparation device has the beneficial effects that the load capacity of the sample boat is increased, and continuous production is facilitated.

Description

technical field [0001] The invention relates to the technical field of graphene film preparation, in particular to a flow-type continuous large-scale graphene film preparation device. Background technique [0002] Graphene material is a thin film material with a single layer of carbon atoms arranged in a regular hexagon. It is the first two-dimensional crystal discovered in the world that can exist independently. Graphene is a revolutionary two-dimensional material, called the most disruptive material of the 21st century by the British Times. We live in a three-dimensional space-time, and the objects we see and use every day are composed of tens of thousands of layers of atomic stacks in terms of atomic size. Before 2004, the traditional theory believed that in a three-dimensional space, due to thermodynamic fluctuations, it was impossible for two-dimensional crystal materials to exist independently. Two British scientists repeatedly removed graphite crystals with adhesive...

AI Technical Summary

Problems solved by technology

How the sample boat transfers back and forth between the low-temperature cooling chamber and the high-temperature process chamber and the maximum load of the sample transfer structure are the technical bottlenecks that limit the efficiency improvement of continuous large-scale CVD equipment

At present, the graphene equipment prepared by CVD uses a cantilevered transfer paddle to transfer samples. The biggest problem with this transfer mode is the load of the transfer paddle. Considering the problem of force arm and moment, with the increase of growth equipment, the sample needs to be transferred from cooling to If the chamber is transferred to the constant temperature zone of the high-temperature process chamber, the force arm of the transfer paddle needs to be lengthened, so the load at the end will be reduced, which is contrary to the purpose of increasing equipment and increasing production

At the same time, when the sample is cooled, sampled, and loaded in the low-temperature cooling chamber, the high-temperature process chamber is in an idle state, resulting in waste of equipment

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