Real-time online test system for gamma ray radiation response of semiconductor device

Abstract

The invention discloses a real-time online test system for gamma ray radiation response of a semiconductor device. The system comprises a semiconductor device gamma ray test probe station and a measuring module for providing bias-pulse test; a lead container in which a radiation source is arranged, an automatic taker and four programmable probe arms are installed on the test probe station, wherein one probe is separately installed on the three probe arms, a microscope is installed on the other probe arm, and the three probes are connected with the bias-pulse measuring module respectively. According to the system, high-precision remote sheet setting and needling are performed on the semiconductor device, then the radiation damage of the semiconductor device is tested on line via the programmable measuring module for providing bias-pulse test, bias can be simultaneously applied while the device to be tested is radiated, and the measured data is quickly stored. The system for sheet setting, needling and sheet taking is accurate and efficient, improves the test efficiency and the test precision, and avoids radiation damage and degradation caused by traditional radiation measurement means.

Description

technical field [0001] The invention relates to a real-time on-line test system for gamma ray radiation response of semiconductor devices. Background technique [0002] With the development of semiconductor materials, they are widely used in various industries. Among them, the electronic automation development of space technology, nuclear industry, nuclear power plants and radiation medical devices are all closely related to semiconductor materials. All kinds of applied electronic equipment in these industries are inevitably exposed to ionizing radiation, so the research on the radiation damage and radiation reliability of semiconductor devices in these electronic equipment in the radiation environment is very important. [0003] The traditional ionizing radiation reliability test of semiconductor materials uses radioactive sources or x-ray generators to irradiate semiconductor devices, and then conducts radiation damage measurement and analysis on another test platform, bu...

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to provide a real-time on-line test system for gamma-ray radiation response of semiconductor devices, to solve the problem that the gamma-ray radiation response test systems of semiconductor devices in the prior art are all manual tests, the needles are not accurate, and the online test is not combined with real-time test , The pulse test time point cannot be automatically programmed, and the bias voltage cannot be applied between every two test points, etc.

Images