A large-load, high-precision, cross-scale piezoelectric linear motor based on compliant foot drive

A linear motor, cross-scale technology, applied in piezoelectric/electrostrictive or magnetostrictive motors, electrical components, generators/motors, etc., can solve the problem of short life, low resolution, and low bearing capacity of linear motors and other problems, to achieve the effect of large load capacity, high motion resolution and stable operation

Active Publication Date: 2017-08-25
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0012] The present invention aims to solve the problems of the existing linear motors with small load capacity, low resolution and short life

Method used

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  • A large-load, high-precision, cross-scale piezoelectric linear motor based on compliant foot drive
  • A large-load, high-precision, cross-scale piezoelectric linear motor based on compliant foot drive
  • A large-load, high-precision, cross-scale piezoelectric linear motor based on compliant foot drive

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specific Embodiment approach 1

[0037] Specific implementation mode one: refer to Figure 1 to Figure 3 Describe this embodiment in detail. A large-load, high-precision, and cross-scale piezoelectric linear motor based on compliant foot drive described in this embodiment includes a base 1, a stator 2, a forward drive component, and a reverse drive component. and mover 5,

[0038] The structures of the forward drive part and the reverse drive part are the same, and both the forward drive part and the reverse drive part have a symmetrical structure with the mover 5 as the central axis,

[0039] The forward drive components include the first forward drive piezoelectric stack 3, the first forward drive piezoelectric stack pretension bolt 4, the second forward drive piezoelectric stack pretension bolt 12, the second forward drive pressure Electric stack 13, second forward compliant foot 14 and first forward compliant foot 15,

[0040] The reverse drive components include the first reverse drive piezoelectric st...

specific Embodiment approach 2

[0052] Specific embodiment 2: This embodiment is a further description of the large-load, high-precision, and cross-scale piezoelectric linear motor based on compliant foot drive described in specific embodiment 1. In this embodiment, the second positive direction compliant The foot 14, the first forward compliant foot 15, the first reverse compliant foot 8, the second reverse compliant foot 9 and the stator 2 are integrally processed.

[0053] In this embodiment, the first reverse compliant foot 8 , the second reverse compliant foot 9 , the second forward compliant foot 14 and the first forward compliant foot 15 are integrally processed with the stator 2 to ensure its precision.

specific Embodiment approach 3

[0054] Specific embodiment three: This embodiment is a further description of a large-load, high-precision, cross-scale piezoelectric linear motor based on compliant foot drive described in specific embodiment one. In this embodiment, it is used to install the mover The guide rail of 5 and stator 2 are processed integrally.

[0055] In this embodiment, the guide rail for installing the mover 5 is integrally processed with the stator 2 to ensure installation accuracy.

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Abstract

The invention discloses a compliant leg driving based large-load, high-accuracy and trans-scale piezoelectric linear motor, relates to the technical field of a precise instrument device and aims at solving the problems of low bearing capability, low resolution ratio and short service lifetime of an existing linear motor. Flexible transformation of each compliant leg and frictional contact between each compliant leg and a rotor are utilized, the displacement output of each piezoelectric stack under the voltage of a sawtooth signal is matched, so that stepping stable movement of the rotor is achieved. The compliant leg driving based large-load, high-accuracy and trans-scale piezoelectric linear motor has the advantages of high loading capability, high movement resolution ratio, infinite theoretical stroke and the like, is stable in running, and can be widely applied to the highly-advanced scientific technical field such as various precision and ultra-precision machining and moving, a micro electro-mechanical system, a robot and micronano operation.

Description

technical field [0001] The invention belongs to the technical field of precision instruments and equipment, and in particular relates to a piezoelectric linear motor. Background technique [0002] Due to the rapid development of micro-nano technology, all kinds of precision and ultra-precision micro-processing and measurement technology, micro-electromechanical systems, precision optics, semiconductor manufacturing, modern medicine and biogenetic engineering, aerospace, robotics, military technology and other high-tech fields There is an urgent need for sub-micron and micro / nano-scale precision drive motors. Traditional macroscopic large-scale drive devices, such as ordinary motors, gear transmissions, screw nuts, worm gears, etc., have been difficult to meet the precision requirements. [0003] With the development of material science, new functional materials provide new solutions to these problems. Among them, the discovery of the inverse piezoelectric effect and the emer...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N2/02H02N2/06
CPCH02N2/021H02N2/067
Inventor 荣伟彬王书鹏王乐锋孙立宁
Owner HARBIN INST OF TECH
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