Monitoring and adjusting device and method for grating misadjustment in vacuum compression chamber
A technology of a vacuum compression chamber and an adjustment device, which is applied to measurement devices, optical instrument testing, and optical performance testing, etc., can solve problems such as limited offset, low precision, and complex structure, so as to avoid coupling problems, improve use efficiency, simple structure
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[0035] The present invention will be further described below in conjunction with the embodiments and accompanying drawings, but the protection scope of the present invention should not be limited thereby.
[0036] see first figure 1 , figure 1 It is a schematic diagram of the overall structure of the vacuum compression chamber grating misalignment monitoring and adjusting device of the present invention. The device consists of:
[0037] Dichroic prism, first half mirror, first far-field detection system, first autocorrelator, third half mirror, fourth half mirror, second far-field detection system, second autocorrelator, A double-pass single-parallel grating pair compressor composed of the first grating, the second grating, the third grating, and the fourth grating, and the first plane mirror and the second half-anti-half placed between the second grating and the third grating The lens and the second plane mirror, the double-pass single-parallel grating pair compressor are ...
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