Substrate breakage detecting device and substrate processing equipment

A technology for detection devices and substrates, applied in measuring devices, optical testing for flaws/defects, optics, etc., can solve problems such as increasing production costs, internal damage to equipment, affecting production efficiency of display panels, etc., and achieve the effect of improving production efficiency

Inactive Publication Date: 2016-07-06
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If the substrate is broken at this time, the robot arm enters the rework machine and cannot take the piece normally, causing collision between the robot arm and the inside of the rework machine, resulting in damage to the robot arm and internal damage to the equipment
Seriously affects the production efficiency of the display panel and increases the production cost

Method used

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  • Substrate breakage detecting device and substrate processing equipment
  • Substrate breakage detecting device and substrate processing equipment
  • Substrate breakage detecting device and substrate processing equipment

Examples

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Embodiment Construction

[0026] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0027] In addition, the following descriptions of the various embodiments refer to the attached drawings to illustrate specific embodiments in which the present invention can be implemented. The directional terms mentioned in the present invention, for example, "upper", "lower", "front", "rear", "left", "right", "inner", "outer", "side", etc., only is to refer to the direction of the attached drawings. Therefore, the direction terms used are for ...

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Abstract

The invention provides a substrate breakage detecting device which comprises detecting units and an output element.The detecting units are arranged below a substrate and comprise light transmitters and light receivers matched with the light transmitters, and the output element is connected with the light receivers and is used for outputting detection results.The substrate breakage detecting device has the advantages that whether the substrate is broken or not can be detected by the aid of linear propagation principles of light, the detection results can be outputted by the output element, accordingly, breakage anomaly of the substrate can be detected, and the substrate production efficiency can be improved.

Description

technical field [0001] The invention relates to the technical field of display panel processing, in particular to a substrate fragment detection device and substrate processing equipment. Background technique [0002] With the continuous development of backlight display technology, liquid crystal display devices such as liquid crystal displays (Liquid Crystal Display, LCD) have been widely used as display components in electronic products such as mobile phones, digital cameras, and personal digital assistants (Personal Digital Assistant, PDA). [0003] In the production process of liquid crystal displays, the glass used as the substrate needs to be coated, but the coating is often flawed due to abnormal interference of the process or incoming materials. Therefore, it needs to be sent to the alignment film dry rework machine by a mechanical arm to remove the coating for reprocessing. In the existing alignment film dry rework machine, after the coating is removed, the substrat...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/95G02F1/13
CPCG01N21/95G01N2021/9513G02F1/1309
Inventor 李任鹏何恭育
Owner WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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