Vacuum trigger switch and manufacturing method thereof
A technology of trigger switch and manufacturing method, which is applied in the field of switches, can solve the problems of personnel and equipment safety hazards, safety hazards, vacuum trigger switches do not have gas detection function, etc., and achieves fast response speed, short recovery time, and large market prospects. Effect
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Embodiment 1
[0050] A vacuum trigger switch. A gas detection module is installed outside the vacuum trigger switch. The gas detection module is made by the following method:
[0051] The specific process is: surface cleaning and treatment of conductive plastic ITO-PET—substrate placed in vacuum chamber—vacuum evaporation of organic layer—evaporation of metal electrodes—encapsulation or testing.
[0052] 1. Conductive plastic ITO-PET cleaning
[0053] First, cut the ITO-PET of a specific size, scrub the ITO-PET substrate with a special detergent and a dust-free cloth to remove various oils and dirt on the substrate, and then put in the compound biological enzyme solution, deionized water, In acetone and ethanol, each sonicate for 35 minutes; then, dry the ITO-PET with high-purity nitrogen to evaporate the ethanol, then put it into the pretreatment chamber, continuously feed high-purity oxygen, and bombard the substrate with plasma for 5 minutes;
[0054] The composition of the compound bio...
Embodiment 2
[0068] A vacuum trigger switch. A gas detection module is installed outside the vacuum trigger switch. The gas detection module is made by the following method:
[0069] The specific process is: surface cleaning and treatment of conductive plastic ITO-PET—substrate placed in vacuum chamber—vacuum evaporation of organic layer—evaporation of metal electrodes—encapsulation or testing.
[0070] 1. Conductive plastic ITO-PET cleaning
[0071] First, cut the ITO-PET of a specific size, scrub the ITO-PET substrate with a special detergent and a dust-free cloth to remove various oils and dirt on the substrate, and then put it in deionized water, acetone, and ethanol in sequence. Ultrasound for 15 minutes each; then, dry the ITO-PET with high-purity nitrogen to evaporate ethanol, then put it into the pretreatment chamber, continuously feed high-purity oxygen, and bombard the substrate with plasma for 5 minutes;
[0072] 2. Preparation of porous structure YSZ
[0073] a) Weigh an appr...
Embodiment 3
[0085] A vacuum trigger switch. A gas detection module is installed outside the vacuum trigger switch. The gas detection module is made by the following method:
[0086] The specific process is: surface cleaning and treatment of conductive plastic ITO-PET—substrate placed in vacuum chamber—vacuum evaporation of organic layer—evaporation of metal electrodes—encapsulation or testing.
[0087] 1. Conductive plastic ITO-PET cleaning
[0088] First, cut the ITO-PET of a specific size, scrub the ITO-PET substrate with a special detergent and a dust-free cloth to remove various oils and dirt on the substrate, and then put in the compound biological enzyme solution, deionized water, Sonicate in acetone and ethanol for 15 minutes each; then, dry the ITO-PET with high-purity nitrogen to evaporate the ethanol, then put it into the pretreatment chamber, continuously feed high-purity oxygen, and bombard the substrate with plasma for 5 minutes;
[0089] The composition of the compound biol...
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