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Aspheric non-zero digit circular subaperture stitching method based on system modeling

A technology of annular sub-aperture and system modeling, which can be used in measurement devices, instruments, optical devices, etc., and can solve the problems of inaccurate correction of return errors.

Inactive Publication Date: 2016-02-10
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the above algorithms all need to rely on complex mathematical calculation formulas or overlapping area fitting, and the correction of return error for each sub-aperture is not accurate

Method used

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  • Aspheric non-zero digit circular subaperture stitching method based on system modeling
  • Aspheric non-zero digit circular subaperture stitching method based on system modeling
  • Aspheric non-zero digit circular subaperture stitching method based on system modeling

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Embodiment

[0050] An example of the application of the present invention to stitching of aspherical non-null annular sub-apertures is described as follows.

[0051] figure 1 It is a diagram of a measurement device for the radius of curvature of an aspheric vertex in a non-zero interference system. The laser wavelength is λ=632.8nm. The thin beam emitted by the laser L1 is expanded into a wide beam of parallel light by the collimator beam expander system L2, and the parallel light travels forward to the beam splitter L3 and is divided into two beams. One path propagates forward to the reference flat mirror L5 and then returns to the original path as a reference wave; the other path propagates forward to the partial zero mirror L8 and then converges and then diverges. The divergent light is basically perpendicular to the measured aspheric surface L9 and then returns, passing through the partial zero again. The mirror L8 enters backward to form a detection wave. The two interfere at the b...

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Abstract

The invention discloses an aspheric non-zero digit circular subaperture stitching method based on system modeling, comprising modeling an experiment interference system, establishing a multiple structure model corresponding to aspheric positions of different belts, and establishing an optimization function based on the multiple structure model, wherein the actually measured wavefront Zernike coefficients of all the belts are meanwhile used as optimization objects, the wavefront Zernike coefficients of the belts in the model are used as dependent variables, and aspheric full aperture surface-shape errors are used as independent variables. The measured surface positions corresponding to each aspheric belt are as used as constraint conditions to execute the optimization function, making the wavefront Zernike coefficient of each belt approach an actual measured value, and thereby the measured surface full aperture surface-shape errors in the model are regarded to approach actual measured values so as to obtain the measured surface full aperture surface-shape errors. The method does not need special form stitching operation or overlapped areas, reduces subapertures possibly required, and improves stitching precision.

Description

technical field [0001] The invention relates to a method for splicing non-zero annular sub-apertures of aspheric surfaces based on system modeling. Background technique [0002] At present, sub-aperture splicing interference detection technology is often used for large-aperture depth aspheric detection. Among various stitching methods, the annular sub-aperture stitching method is widely used in the detection of rotationally symmetric aspheric surfaces due to its simple detection structure. It uses a transmission spherical mirror to generate a standard spherical wave as a reference wavefront, matches different annulus areas of the aspheric surface at different detection positions, so that each matching area can reach an approximate zero-position detection condition, and then uses the sub-aperture splicing algorithm to splice the full-aperture surface shape error . However, since the radius of curvature of each ring area of ​​the measured aspheric surface is different, it is...

Claims

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Application Information

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IPC IPC(8): G01B11/24
Inventor 刘东杨甬英张磊师途种诗尧
Owner ZHEJIANG UNIV
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