A New Type of High Precision Hybrid Vibration Isolation Device

Abstract

The present invention provides a new type of high-precision hybrid vibration isolation device; including a mounting plate, a middle partition, a bottom plate, an air spring and a magneto-rheological damper, and the mounting plate and the middle partition are connected through the magneto-rheological damper , the intermediate partition is fixedly connected to the air spring through bolts, and the bottom plate is fixedly connected to the air spring. The magnetorheological dampers are used to isolate low-frequency vibration signals from the ground. In view of the fact that the ground signal source may propagate in multi-dimensional directions, the four sets of magnetorheological dampers have vibration isolation capabilities in six degrees of freedom. The air spring and the magneto-rheological damper are reasonably connected with the middle partition, so that high-precision active and passive hybrid vibration isolation capabilities can be realized. The present invention adopts a stacked structure, which has a compact structure and can realize vibration isolation capabilities with multiple degrees of freedom, so that the present invention has the advantages of strong practicability and high reliability, and provides advanced vibration isolation means for high-precision equipment platforms .

Description

technical field [0001] The invention relates to a novel high-precision hybrid vibration isolation device, in particular to provide advanced vibration isolation means for high-precision equipment platforms, and in particular to a novel high-precision hybrid vibration isolation device. Background technique [0002] With the development of high-speed, high-efficiency, high-precision and automation of production and transportation machinery, the intensity of vibration sources in engineering is continuously increasing, and the hazards of vibration and noise are becoming increasingly prominent. Vibration not only brings serious harm to operators, precision instruments and meters, machinery and equipment, and building structures, but also brings harm and influence to people's living environment and physical and mental health due to vibration and noise. [0003] The most widely used vibration control method is vibration isolation technology. From the energy point of view, vibration ...

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Problems solved by technology

[0006] Because passive vibration isolation cannot effectively isolate low-frequency or ultra-low-frequency interference components, most foreign countries adopt active vibration isolation technology or hybrid vibration isolation technology combining passive vibration isolation and active vibration isolation, especially to meet the requirements of inertial instrument calibration technology. A series of pneumatic and hydraulic servo vibration isolation systems developed according to the requirements of the country have also been researched on vibration isolation, but they are mainly concentrated on passive vibration isolation. The research on active vibration isolation technology is carried out late, and there are not many research results. , relevant theories, technologies and vibration isolation devices need to be further studied and discussed, especially in the research of high-precision vibration isolation technology and related basic theoretical issues, there is still a large gap compared with the international advanced level. This situation has seriously limited The development of my country's precision equipment system, precision measurement and precision machining technology

So far, there is no hybrid vibration isolation device using this structure

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