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Measurement method and system for microscale temperature distribution of devices based on fiber optic lens

A technology of fiber optic lens and temperature distribution, applied in the direction of physical/chemical change thermometers, thermometers, measuring devices, etc., can solve the measurement accuracy, efficiency and speed limitations, it is difficult to predict a priori, and can not face the high resolution of the target Measurement and other problems, to achieve the effect of high precision, high measurement accuracy and fast temperature measurement

Active Publication Date: 2018-03-23
INST OF FLUID PHYSICS CHINA ACAD OF ENG PHYSICS
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Problems solved by technology

However, the location of local high temperature depends not only on device design, but also on the quality of integrated circuits, which is often difficult to predict a priori
At present, the temperature measurement method of microelectronic devices mainly adopts Raman spectroscopy technology, the accuracy, efficiency and speed of the measurement are limited, and it is impossible to perform high-resolution measurement of surface targets

Method used

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  • Measurement method and system for microscale temperature distribution of devices based on fiber optic lens
  • Measurement method and system for microscale temperature distribution of devices based on fiber optic lens

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Embodiment Construction

[0014] The present invention will be further described below in conjunction with the accompanying drawings and embodiments, and the present invention includes but not limited to the following embodiments.

[0015] Thought of the present invention is:

[0016] Rare earth luminescent film with good electrical insulation and thermal conductivity, and micron or submicron rare earth luminescent powder uniformly dispersed inside. Since the rare earth particles have a thermally coupled energy level, when the rare earth luminescent film is coated on the surface of the device to be measured, the film will produce fluorescence of two different wavelengths under the excitation of an external laser light source, and the two different wavelengths will be different with the temperature of the device. Fluorescence has different energies. By detecting and calculating the energy ratio of fluorescence of two different wavelengths at a certain point on the surface of the rare earth thin film, t...

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Abstract

The invention provides a method and system for measuring the micron-scale temperature distribution of a device based on an optical fiber lens. A rare earth film is coated on the surface of a device sample to be measured; Fluorescence of different wavelengths; separate the fluorescence of two different wavelengths, and image the rare earth films under different wavelengths of fluorescence; respectively demodulate the imaging of rare earth films under different wavelengths of fluorescence, and calculate the imaging correspondence of rare earth films under different wavelengths of fluorescence The energy ratio of the points is used to obtain the two-dimensional temperature distribution on the surface of the device to be measured. The invention has the advantages of fast temperature measurement and high precision, and can display the two-dimensional temperature distribution on the device surface in real time.

Description

technical field [0001] The invention belongs to the technical field of device temperature monitoring, and relates to a method and a system for measuring two-dimensional temperature distribution of a device at a micron scale, and in particular to a method and a system for rapidly discovering and detecting high temperature points of a device by optical means. Background technique [0002] With the improvement of the performance requirements of electronic devices in the industry, the size of its components has been continuously reduced, and micron and nanometer electronic devices have been widely used in various large-scale integrated circuits. The resistance impedance of such small-sized electronic devices is usually relatively large, so that the Joule heating effect cannot be ignored. Very small changes in the local impedance within the channel of an electronic device have the potential to generate localized high temperatures on the electronic device. Localized high temperat...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01K11/32
Inventor 刘国栋胡流森吴凌远
Owner INST OF FLUID PHYSICS CHINA ACAD OF ENG PHYSICS
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