Graphene structure, graphene device and manufacturing method thereof

Abstract

The invention discloses a graphene structure, a graphene device, and manufacturing methods thereof. The graphene structure manufacturing method comprises the steps of providing a substrate which has a trench, forming spaced catalyst layers in the trench along the trench direction, and growing a graphene layer on the upper end face of the catalyst layers. A graphene strip is formed by forming the spaced catalyst layers in the trench and growing the graphene layer on the upper end face of the catalyst layers. The method is especially suitable for preparing a nano strip of smaller size, can be easily used in a large-scale integrated manner, and can easily integrate a graphene device.

Description

technical field [0001] The invention belongs to the field of semiconductor manufacturing, and in particular relates to a graphene nanobelt, a graphene device and a manufacturing method thereof. Background technique [0002] With the rapid development of semiconductor technology, higher requirements are put forward for the integration and performance of integrated circuit devices, and new materials, new processes, and new devices are constantly being proposed and researched. [0003] Graphene, as a new material with a two-dimensional structure, has attracted widespread attention since it was isolated and prepared in 2004, and has quickly become a research hotspot. Since graphene has ultra-high carrier mobility at room temperature, if graphene is used as a channel material to make transistors, graphene devices will have better performance. However, graphene itself does not have an energy gap, so graphene transistors do not have a high switching ratio and cannot be used in app...

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Problems solved by technology

[0004] Making graphene into nanobelts is one of the methods to open the energy band of graphene, which puts forward higher requirements for the preparation process. At present, anisotropic etching using electron beam exposure technology, chemical methods, and sonochemical methods have been proposed. method, carbon nanotube cutting method, silicon carbide-based epitaxy, organic synthesis, direct growth of metal templates and other methods to prepare graphene nanoribbons, but many methods are difficult to use in large-scale integration, and some cannot provide sufficiently narrow nanoribbons. with and sufficiently smooth edges

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