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Temperature self-compensation method and measurement method of double resonator pressure sensor

A pressure sensor and resonator technology, applied in the field of sensors, can solve the problem of difficult compensation effect of devices, and achieve the effect of improving compensation effect, reducing complexity, and overcoming inaccurate temperature measurement.

Active Publication Date: 2017-02-22
山东中科思尔科技有限公司
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Problems solved by technology

Finally, it is difficult for the device to achieve satisfactory compensation effect under full-scale pressure load

Method used

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  • Temperature self-compensation method and measurement method of double resonator pressure sensor
  • Temperature self-compensation method and measurement method of double resonator pressure sensor
  • Temperature self-compensation method and measurement method of double resonator pressure sensor

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Embodiment Construction

[0021] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings. It should be noted that, in the drawings or descriptions of the specification, similar or identical parts all use the same figure numbers. Implementations not shown or described in the accompanying drawings are forms known to those of ordinary skill in the art. Additionally, while illustrations of parameters including particular values ​​may be provided herein, it should be understood that the parameters need not be exactly equal to the corresponding values, but rather may approximate the corresponding values ​​within acceptable error margins or design constraints. The directional terms mentioned in the embodiments, such as "upper", "lower", "front", "rear", "left", "right", etc., are only referring to the directions of the...

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Abstract

The invention provides a temperature self-compensating method and a measuring mode for a double-resonator pressure sensor. The temperature self-compensating method includes the steps that m temperature calibration points are selected within a preset temperature range; n pressure calibration points are selected within a preset pressure range; frequencies of two resonators are measured at all the temperature calibration points and all the pressure calibration points respectively, the frequencies f1 of the first resonator and the frequencies f2 of the second resonator are obtained through testing, and m*n sets of calibration data are obtained in total; by means of the m*n sets of calibration data, a binary function fitting method is used for obtaining an expression of the pressure function G1 of the double-resonator pressure sensor, and the expression is p=G1(f1,f2). The frequencies of the two resonance beams are measured for temperature self-compensating, an external temperature sensitive element is not needed, the problem that temperature measurement is inaccurate because distribution of a temperature field is indeterminate can be solved, and the compensation accuracy can be improved.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a temperature self-compensation method and a measurement method of a double-resonator pressure sensor. Background technique [0002] Micro-Electro-Mechanical Systems (MEMS for short) is a kind of fusion of various micro-fabrication technologies, using the mature technology developed from semiconductor technology, MEMS devices can be produced in large quantities and at low cost. In addition, MEMS devices generally have the characteristics of small size and good stability, and are widely used in many fields such as aerospace and automobile manufacturing. The output detection signal of the resonant micromechanical pressure sensor is directly converted from the vibration frequency signal of the resonator. Compared with the output amplitude signal (mainly voltage amplitude) of the capacitive, resistive, and piezoelectric types, the frequency signal has a higher stability and anti-int...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L9/00
Inventor 王军波李忆南陈德勇谢波
Owner 山东中科思尔科技有限公司
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