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Air flotation high-precision detection tool

A detection tooling, high-precision technology, applied in the field of optical detection, can solve problems such as low detection accuracy and support tooling errors, and achieve the effects of uncomplicated structure, reduced friction, and easy implementation.

Inactive Publication Date: 2015-03-25
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] The purpose of the present invention is to provide an air flotation high-precision detection tool to solve the technical problem that the error caused by the support tool in the prior art leads to low detection accuracy

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  • Air flotation high-precision detection tool

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Embodiment Construction

[0021] The present invention will be further explained below in conjunction with the drawings.

[0022] See attached figure 1 And figure 2 , An air-floating high-precision detection tool of the present invention includes a bottom support base 1, a positioning structure 2 and an air inlet 3. The positioning mechanism includes a limit block 2001 and a spiral differential head 2002, and the spiral differential head 2002 and a limit block 2001 is a threaded connection. The limit block 2001 is fixedly connected to the bottom support base 1. There are multiple air jet holes distributed on the bottom support base 1, and multiple positioning structures 2 are evenly distributed and fixed on the bottom support base 1. The spiral differential head of the positioning structure 2 clamps the workpiece 4 to be measured.

[0023] There are grooves on the side of the bottom support base 1, which are mainly used for the transportation of air floating support tools. Bottom Support The bottom surfac...

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Abstract

The invention provides an air flotation high-precision detection tool and belongs to the field of optical detection. The detection tool solves the technical problems that due to stress and friction caused by a supporting mode of a traditional detection tool in the prior art, deformation is caused, and precision is low. The detection tool comprises a plane base. A plurality of air injection holes are distributed in the surface of the base. Three limiting blocks are arranged around the base to ensure that the detection work-piece position is fixed. The air flotation principle is utilized, a method of injecting air through the small holes is adopted, an air gap is formed between a detection work-piece and a supporting rigid body, and therefore the work-piece can float above the detection tool to be detected; as an air flotation mode is adopted, the work-piece is stressed uniformly and stably, the transverse friction is avoided, the deformation of the detection work-piece and the stress caused by the transverse friction due to supporting of the tool can be eliminated, the detection reproducibility and the detection precision are improved, and the detection tool can be applied to ultra-high-precision element face shape detection.

Description

Technical field [0001] The invention belongs to the field of optical detection, and particularly relates to an air-floating high-precision detection tool. Background technique [0002] In the manufacturing process of high-precision components, inspection and processing is a gradual iterative convergence process, and the accuracy of the inspection often determines the convergence effect of the processing. In order to achieve a good convergence effect, the detection accuracy needs to be at least 3 times higher than the final required component surface accuracy. Therefore, in optical manufacturing, optical inspection is the basis of optical processing. Without inspection, there is no processing. Inspection accuracy directly determines the accuracy of final manufactured components. In the field of sub-nanometer-level high-precision surface shape detection, there are extremely high requirements for detection instruments, detection methods and detection environments; after meeting the...

Claims

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Application Information

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IPC IPC(8): G01B11/00
Inventor 苗二龙张永凯苏东奇彭石军隋永新杨怀江
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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