Heating plate of welding platform, manufacturing method of welding platform, and welding platform

A technology of welding platform and manufacturing method, which is applied in the direction of welding equipment, auxiliary welding equipment, welding/cutting auxiliary equipment, etc., can solve the problems of potential safety hazards of operators, high difficulty of moving away, and easy damage of target components, etc., to achieve The effect of increasing the welding bonding rate and reducing the deformation rate

Active Publication Date: 2016-07-06
KONFOONG MATERIALS INTERNATIONAL CO LTD
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  • Abstract
  • Description
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Problems solved by technology

[0004] The problem solved by the present invention is that when moving the large sputtering target assembly away from the welding platform, it is very difficult to remove, the target assembly is easily damaged, and it is easy to bring safety hazards to the operators

Method used

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  • Heating plate of welding platform, manufacturing method of welding platform, and welding platform
  • Heating plate of welding platform, manufacturing method of welding platform, and welding platform

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Embodiment Construction

[0052] When moving large sputtering target components away from the welding platform, it is very difficult to move away, the target components are easily damaged, and the reasons why it is easy to bring safety hazards to operators are:

[0053] After the welding is completed, the operator needs to use manpower to move the large sputtering target assembly formed by welding away from the welding platform. Compared with the two single pieces of large sputtering target and large back plate, the volume and weight of the large sputtering target assembly formed by welding have increased significantly, and the weight reaches 240-260 kg. If manpower is used directly, The transfer of large sputtering target assemblies is simply not possible. If large-scale mechanical equipment is used to fix the upper part of the large-scale sputtering target assembly and transfer it from the welding platform, on the one hand, the cost is high, and on the other hand, large-scale mechanical equipment is ...

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Abstract

Disclosed are a heating plate for a welding bench, a manufacturing method of the welding bench and the welding bench. The welding bench is used for welding a target and a back plate and comprises a base having a supporting face and at least two heating plates arranged on the supporting face; every two adjacent heating plates has spacing. The welding bench allows an operator to extend a forklift arm into the spacing and hold a large sputtering target component from beneath the spacing, the large sputtering target component is removed from the welding bench, and no damage is caused to the large sputtering target component.

Description

technical field [0001] The invention relates to the field of semiconductors, in particular to a heating plate of a welding platform, a manufacturing method of the welding platform, and a welding platform. Background technique [0002] In the semiconductor industry, the target component is welded by a target that meets the sputtering performance and a back plate with a certain strength. In the prior art, a welding platform is used to realize the welding of the target material and the back plate. The welding platform is composed of a base and a heating plate arranged on the base, and the heating plate is integrally formed. [0003] With the development of semiconductor technology, the target size is also increasing. When moving the large sputtering target assembly welded by the large sputtering target and the large back plate away from the welding platform, it is very difficult to remove, the target assembly is easily damaged, and it is easy to bring safety hazards to the op...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23K37/00
CPCB23K37/0461C23C14/3414
Inventor 姚力军相原俊夫大岩一彦潘杰王学泽李健成
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD
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