Precision positioning drive-end pre-tightening device

Abstract

The invention discloses a precision positioning drive-end pre-tightening device. The precision positioning drive-end pre-tightening device comprises a positioning platform, an actuator, a capacitive sensor, a capacitive sensor support, a pre-tightening block and a thin-film force sensor. A sliding groove is formed in the middle of the positioning platform. The pre-tightening block, the thin-film force sensor and the actuator are sequentially arranged in the sliding groove. The capacitive sensor support is fixed to the positioning platform. Three connecting rods which are sequentially connected with one another through flexible hinges are arranged on one side of a support body of the capacitive sensor support in the axial direction. The end face of the capacitive sensor is parallel to the upper side face of the pre-tightening block, and a gap is formed between the end face of the capacitive sensor and the upper side face of the pre-tightening block. The positioning platform is further provided with a two-stage pre-tightening device for pre-tightening the pre-tightening block. The precision positioning drive-end pre-tightening device can meet the requirements for precision positioning, precision and ultra-precision machining, precision operation and precision measurement and can also meet the requirements of a micro electromechanical system and related fields. The precision positioning drive-end pre-tightening device is simple in technological means and easy to realize, and has outstanding essential characteristics and remarkable progress compared with the prior art.

Description

technical field [0001] The invention relates to a pretensioning device in technologies such as micro-nano operation, micro-nano measurement, and micro-nano manufacturing, and in particular to a pre-tensioning device for a precise positioning driving end. Background technique [0002] The precision positioning platform is a key part of micro-nano operation, micro-nano measurement and micro-nano manufacturing technologies, and plays an important role in precision and ultra-precision machining, precision operation, precision measurement and micro-electromechanical systems and other related fields. The driver can be divided into mechanical and electromechanical according to the driving principle, and the latter can be divided into piezoelectric actuation, thermal actuation, electrostatic actuation, electromagnetic actuation, magnetostriction and voice coil motor. Among them, the piezoelectric ceramic driver has sub-nanometer resolution and millisecond-level response speed, as we...

AI Technical Summary

Problems solved by technology

Although this patent can avoid the lateral force, the torque generated during rotation cannot be eliminated, and the micro-nano level change of the preload caused by any reason cannot be measured or compensated by feedback. In actual use, especially under the long-term high-frequency movement of the driver The preload accuracy and stability cannot be guaranteed

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