Double-end tuning fork three-dimensional resonance triggering probe system and true three-dimensional measurement method thereof

Abstract

The invention discloses a double-end tuning fork three-dimensional resonance triggering probe system and a true three-dimensional measurement method of the double-end tuning fork three-dimensional resonance triggering probe system. The double-end tuning fork three-dimensional resonance triggering probe system is composed of a supporting frame, connection pieces, a double-end tuning fork and an optical fiber micro-probe ball. The supporting frame is used for fixing a whole measurement head mechanism. The connection pieces are fixed to the two ends below the supporting frame respectively and used for being connected with the supporting frame and the double-end tuning fork. The double-end tuning fork serves as a cantilever beam and a micro-force sensor at the same time. The integrated optical fiber micro-probe ball is fixedly arranged below the middle of a lower fork arm of the double-end tuning fork. According to the method, the integrated optical fiber micro-probe ball driven by the double-end tuning fork is in contact with a sample in a slightly-knocking mode in the Z direction and is in contact with the sample in a friction mode in the X direction and the Y direction, the change of a resonance signal of the double-end tuning fork is detected to serve as a feedback value to express the touch degree of the integrated optical fiber micro-probe ball and the surface of the sample, and therefore true tree-dimensional measurement conducted on the sample is achieved. Accurate triggering positioning and low-destructive measurement are conducted on flexible materials and the like through the double-end tuning fork three-dimensional resonance triggering probe system, and high-accuracy true three-dimensional measurement can be conducted on the inner wall of the sample with tiny inner holes.

Description

technical field [0001] The invention relates to the field of micro-nano probes, in particular to a double-ended tuning fork three-dimensional resonance trigger probe system and a true three-dimensional measurement method thereof. Background technique [0002] Nano measurement technology is one of the basic disciplines of nano science and technology. Ultrafinishing and ultramicromachining have entered a new era of nanotechnology. The true three-dimensional measurement of micro-nano structures such as micro-optical devices and MEMS requires nanometer and sub-nanometer levels. The measurement force reaches micronewton or even nanonewton level, but the measurement accuracy of commercial CMM is not high at present, and the micro probe ball diameter of the three-dimensional probe used is relatively large, so it cannot detect micro devices with small feature size. Three-dimensional trigger positioning technology is the core of micro-nano three-dimensional measurement technology, an...

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Problems solved by technology

[0004] The purpose of the present invention is to provide a double-ended tuning fork three-dimensional resonance trigger probe system and its true three-dimensional measurement method to solve the problems existing in the prior art three-dimensional measurement

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