Compensation system and device and method for detecting high-order aspheric surface
A high-order aspheric surface and compensation system technology, which is applied in the field of optical aspheric surface detection, can solve the problems of low precision and achieve the effect of reliable and effective detection accuracy, increased cost, and reduced processing and assembly accuracy requirements
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[0030] As mentioned in the background art, in the manufacturing process of the high-order aspheric mirror, the detection of the high-order aspheric surface is quite a key technology. Most of the existing high-order aspheric detection technologies use the interference detection method. In this method, in order to improve the compensation ability for high-order aspheric surfaces with large deviation and large relative aperture, it is often necessary to use multiple aspheric optical lenses to form a compensation system. However, there will be errors in the dimensions of each optical lens when it is manufactured, and there are assembly alignment errors between the lenses. Therefore, with the increase in the number of optical lenses, the error of the compensation system itself is continuously enlarged. Taking 6 aspheric lenses as an example, even if each lens is prepared with extremely strict requirements, after these lenses are assembled together, it can cause The error can still...
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