Single-degree-of-freedom flexible fine adjustment mechanism-based micro-displacement sensor calibration device

Abstract

The invention discloses a single-degree-of-freedom flexible fine adjustment mechanism-based micro-displacement sensor calibration device, belongs to the field of accurate fine adjustment and detection, and aims to solve the problems of poor repeated positioning accuracy and long-term stability of measurement in the prior art. The device comprises an adjustment frame, a piezoelectric driver and a calibration reference component, wherein the piezoelectric driver is fixedly arranged on the adjustment frame, and is used for driving a moving rod of the adjustment frame to move; the calibration reference component is fixedly arranged on the adjustment frame; the calibration reference component and a micro-displacement sensor to be calibrated are simultaneously used for measuring the output displacement of the moving rod. According to the calibration device, the moving rod capable of providing micro-displacement and a higher-accuracy sensor grating ruler used as a detection reference are provided, and the grating ruler and the micro-displacement sensor to be calibrated are simultaneously used for measuring the output displacement of the moving rod to realize the calibration of the micro-displacement sensor to be calibrated; the calibration device has the advantages of simple structure, high repeated positioning accuracy, high long-term stability and the like.

Description

technical field [0001] The invention belongs to the field of precise micro-motion adjustment and detection, and in particular relates to a micro-displacement sensor calibration device based on a single-degree-of-freedom flexible micro-motion adjustment mechanism. Background technique [0002] As the detection device of the precision micro-adjustment mechanism, the micro-displacement sensor's performance index directly determines the closed-loop control accuracy of the adjustment mechanism, so it needs to be calibrated. [0003] The Chinese patent with the publication number CN202501835U discloses a technical solution called a vertical linear displacement sensor calibration / calibration device. The device uses a linear motor as a drive, uses a precision rail seat as a guide, and uses a grating ruler as a calibration reference , but due to the use of linear motors and guide rails, there are disadvantages such as friction and return errors during the movement process, which affe...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to propose a micro-displacement sensor calibration device based on a single-degree-of-freedom flexible micro-adjustment mechanism to solve the problems of poor repeat positioning accuracy and poor long-term stability of measurement existing in the prior art

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