Method and device for calibrating optically biaxial compensation and gas bath type linear displacement laser interferometer
A laser interferometer, laser interference technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problem of large Abbe error, inconsistent influence, and inability to determine whether the interferometer group and measuring mirror belong to standard laser interferometer components or It belongs to the problem of being calibrated, and achieves the effect of small Abbe error and guaranteed accuracy
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[0029] The specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0030] A dual-optical axis compensation and air bath linear displacement laser interferometer calibration device, including a standard laser interferometer laser 1 and two receivers 6 and 7 arranged at positions capable of receiving standard laser interferometer interference signals, the wires connect the two The two receivers 6 and 7 are respectively connected to the standard laser interferometer signal processing system 8; the output optical path of the standard laser interferometer laser 1 is equipped with a dual-axis through-hole 12 that allows the calibrated laser interferometer measurement beam 11 to pass through Hollow standard laser interference mirror group 2; guide rail 17 is arranged on one side of biaxial hollow standard laser interference mirror group 2, and the moving table 16 is fitted on the guiding rail 17, and the ...
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