A Stepless Impedance Matching Network for Ultrasonic Power Supply

Abstract

The invention relates to an impedance stepless matching network used for an ultrasonic power supply and a control method. The impedance stepless matching network comprises a first thyristor, a second thyristor, a first inductor and a second inductor, wherein the cathode of the first thyristor and the anode of the second thyristor are connected with one end of the first inductor; the anode of the first thyristor and the cathode of the second thyristor are connected with one end of the second inductor; the other end of the first inductor and the other end of the second inductor are connected to the main circuit inverter output end of the ultrasonic power supply and are connected with a transducer in parallel. An ultrasonic power supply inverter bridge outputs a voltage sampling signal subjected to signal processing to respectively generate driving signals synchronous with the negative direction and the forward direction of output voltage, the driving signals are respectively used for driving the gate pole of the first thyristor and the gate pole of the second thyristor, and the thyristor conduction angle can be controlled by a duty cycle control circuit so as to regulate the equivalent inductance and achieve the frequency tracking and fine tuning effects.

Description

technical field [0001] The invention relates to a stepless impedance matching network for an ultrasonic power supply and a control method. Background technique [0002] The ultrasonic power supply is usually called the ultrasonic generating source, and its function is to convert electrical energy into a high-frequency alternating current signal that matches the ultrasonic transducer. The load of the ultrasonic power supply is the ultrasonic transducer, and the ultrasonic transducer has static capacitance. Therefore, when the ultrasonic transducer is used, it must have a corresponding inductive matching network to cooperate with the work of the ultrasonic transducer. [0003] At present, the commonly used ultrasonic power supply matching network includes a single inductance matching network and a T-shaped matching network. By changing the size of the inductance in the matching network, the resonance frequency can be fine-tuned. The traditional method of adjusting the size of...

AI Technical Summary

Problems solved by technology

The traditional method of adjusting the size of the matching inductance is realized by inductance switching. This method makes the size accuracy of the matching inductance in the matching network limited by the minimum value of the switching inductance, and it is a step-by-step adjustment.

It is impossible to achieve the effects of inductance matching and frequency tracking with high precision

Images