a kind of vo x Terahertz uncooled focal plane detector assembly
A focal plane detector, terahertz technology, applied in the field of imaging and terahertz detection, can solve the problems of small array size, long imaging period, low sensitivity, etc., and achieve the effect of fast response speed, short imaging time and high sensitivity
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[0019] The present invention will be described in detail below with reference to the accompanying drawings and examples.
[0020] In recent years, high-performance, low-cost uncooled focal plane detector technology has been developed rapidly, and has been widely used in the field of infrared thermal imaging. At present, the relatively mature uncooled infrared focal plane detectors for infrared detection mainly include pyroelectric and microbolometers, of which microbolometers mainly include VO x and polysilicon. VO x The uncooled focal plane detector has a wide spectral response range in theory, even in the THz band, so it has a basis for application in the THz band. VO x Compared with pyroelectric uncooled focal plane detectors, uncooled focal plane detectors have higher sensitivity. Compared with the currently commonly used unit detectors, it is an area array detector that does not require scanning imaging, so the response speed is fast and the imaging time is short.
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