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A method for obtaining equipment utilization rate information

An acquisition method and utilization rate technology, which is applied in the field of data information, can solve problems such as no public method for obtaining equipment utilization rate, and achieve the effect of improving equipment utilization rate, reasonable arrangement, and convenient invocation

Active Publication Date: 2015-08-26
SHANGHAI HUALI MICROELECTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] It can be seen that there is currently no published method for obtaining equipment utilization in semiconductor production

Method used

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  • A method for obtaining equipment utilization rate information

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Embodiment Construction

[0029] The present invention is a method for obtaining equipment utilization rate information. Based on the equipment utilization rate monitoring system, the equipment utilization rate detection system in the method of the present invention includes: a control terminal, a processing terminal and an information collection terminal. Wherein, the control terminal includes an information input device, an information output device and an information calling device.

[0030] The equipment usage detection system also includes a preset database and a equipment usage status database.

[0031] figure 1 It is a schematic diagram of the steps of the method embodiment of the present invention.

[0032] like figure 1 Shown:

[0033] First, store the device indication data information and device data integration information of each device in the preset database through the information input device in the control terminal, wherein the device indication data information includes: device nam...

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Abstract

The invention relates to an information acquisition method for equipment utilization. The information acquisition method for the equipment utilization specifically comprises the following steps of transferring equipment designation data and equipment data integration manner data by input equipment in a control side and storing in a preset database; acquiring real-time usage state data and historical usage state data of production equipment by an information acquisition side, and storing the real-time usage state data and the historical usage state data in an equipment usage state database; calling the equipment designation data information stored in the preset database by calling equipment in the control side, and acquiring data in the equipment usage state database according to the equipment designation data information; and calling the equipment data integration manner data by a processing side to process the data acquired by the control side to generate chart data, and sending the chart data to output equipment in the control side for outputting. Through the information acquisition method for the equipment utilization, the flexible analysis of equipment operating state data can be realized, and the equipment utilization is correspondingly improved.

Description

technical field [0001] The invention relates to the technical field of data information, in particular to a method for acquiring equipment utilization rate information based on an equipment utilization rate monitoring system. Background technique [0002] In today's semiconductor manufacturing industry, due to the increasingly high requirements for semiconductor products, the process in semiconductor production has become more and more complicated. Therefore, a very complicated process step is required to produce a finished semiconductor device. [0003] These process steps contain a large number of process data and related equipment data. Through the production automation system and manufacturing execution system, every subtle action data can be recorded for the current equipment, such as recording the loading time of each batch of goods, machine Setup time, test program loading time, production start time and production completion time, etc., and even record the test time ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G06F11/34G06F17/30
Inventor 龚丹莉徐燕菁娄晓祺邵雄
Owner SHANGHAI HUALI MICROELECTRONICS CORP
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