Precise micro motion platform based on shape memory material coarse motion driver

Abstract

The invention discloses a precise micro motion platform based on a shape memory material coarse motion driver, belonging to a micro motion platform technology. A Y-directional coarse motion platform base, an X-directional coarse motion platform base, an X-directional coarse motion platform, an XY two-dimensional micro motion platform base, a Y-directional micro motion platform and an objective table are mounted on a base from bottom to top; the Y-directional micro motion platform is mounted in the X-directional micro motion platform through a Y-directional micro motion flexible articulated mechanism; the X-directional micro motion platform is mounted in the XY two-dimensional micro motion platform base through an X-directional micro motion flexible articulated mechanism and is driven by an X-directional piezoelectric micro motion driver and a Y-directional piezoelectric micro motion driver; and the X-directional coarse motion platform is matched with the X-directional coarse motion platform base through an X-directional coarse motion slide way and is driven by an X-directional shape memory material coarse motion driver and a Y-directional shape memory material coarse motion driver. The precise micro motion platform is simple and compact in structure, high in positioning precision and wide in application prospect and is easy to control.

Description

technical field [0001] The invention belongs to the micro-motion platform technology, and mainly relates to a precision micro-motion platform driven by shape memory materials. Background technique [0002] Precision displacement technology occupies an extremely important position in modern cutting-edge industrial production and scientific research fields, and is widely used in fields requiring fine operations such as micro-feeding, optical fiber docking, and precision and ultra-precision machining. The precise displacement is realized by the drive of the precision micro-motion platform driven by the driver. The micro-motion drive of the micro-motion platform mostly uses a piezoelectric driver. The piezoelectric driver is a new type of micro-displacement device developed in recent years. It has small size, large driving force, The advantages of high resolution, easy control and small output displacement have been widely used as drive components in precision machinery. Howeve...

AI Technical Summary

Problems solved by technology

However, at present, the coarse motion drive of the micro-motion platform mostly adopts the traditional mechanical transmission device, the structure is complex, the control process is cumbersome, and the positioning accuracy is low.

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