Non-contact automatic detection device for absolute grating ruler overall measuring accuracy

An automatic detection device and a technology for measuring accuracy, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve problems such as errors in detection results, and achieve the effect of ensuring accuracy requirements

Inactive Publication Date: 2013-01-09
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

The existing detection methods for the overall accuracy of the grating scale mostly use a contact measurement structure. The contact probe is installed on the mobile slide of the working platform, and moves synchronously with the reading head of the grating scale to test the accuracy of the grating scale. Due to the existence of friction Force, stress deformation and surface flaws, there will be errors in the test results

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  • Non-contact automatic detection device for absolute grating ruler overall measuring accuracy

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Embodiment Construction

[0009] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.

[0010] Such as figure 1 As shown, the non-contact automatic detection device for the overall measurement accuracy of the absolute grating ruler, the device includes: a workbench 1, a collimator 2, a screw 3, a first mirror 4, a second mirror 5, a slide table 6. The grating ruler and the laser interferometer 8; the collimator 2 is fixed on one side of the workbench 1; the standard ruler 7 in the grating ruler is placed on the workbench 1, parallel to the guide rail on the workbench 1, and the grating ruler reading head Placed in the slide table 6; the lead screw 3 is fixed on the workbench 1 below the collimator 2, the slide table 6 is placed on the guide rail of the workbench 1, and the lead screw 3 controls the movement of the slide table 6 on the guide rail; the first The reflector 4 and the second reflector 5 are fixed on the slide table 6...

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Abstract

The invention discloses a non-contact automatic detection device for absolute grating ruler overall measuring accuracy, and belongs to the field of grating detection. The device comprises a working platform, a collimator, a screw rod, a first reflector, a second reflector, a sliding platform, a grating ruler and a laser interferometer, wherein the collimator is fixed on one side of the working platform, a standard ruler in the grating ruler is disposed on the working platform and parallel to a guide rail of the working platform, a reading head of the grating ruler is disposed in the sliding platform, the screw rod is fixed on the working platform below the collimator, the sliding platform is disposed on the guide rail of the working platform, the screw rod controls the sliding platform to move on the guide rail, the first reflector and the second reflector are fixed on the sliding platform, and the laser interferometer is fixed on the other side of the working platform. By non-contact detection, the device is used for detecting overall measuring accuracy of the grating ruler after processed and mounted, a qualified grating ruler is selected for online real-time detection to guarantee accuracy requirements needed by the grating ruler.

Description

technical field [0001] The invention belongs to the field of grating detection, and in particular relates to a non-contact automatic detection device for the overall measurement accuracy of an absolute grating ruler. Background technique [0002] After the final assembly of the absolute grating ruler is completed, the errors accumulated in each production link and assembly link in the processing will affect the measurement accuracy of the grating ruler, and the overall accuracy of the grating ruler needs to be tested. The existing detection methods for the overall accuracy of the grating scale mostly use a contact measurement structure. The contact probe is installed on the mobile slide of the working platform, and moves synchronously with the reading head of the grating scale to test the accuracy of the grating scale. Due to the existence of friction Force, stress deformation and surface flaws, there will be errors in the test results. Contents of the invention [0003] ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/00G01B11/02
Inventor 王潇洵谭向全黄剑波马俊林孙强
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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