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Process data acquisition method, device and system

A technology of process data and data acquisition, applied in data acquisition and recording, electrical components, semiconductor/solid-state device manufacturing, etc., can solve the problems of reducing acquisition efficiency, improve data acquisition efficiency, ensure timing and consistency, reduce The effect of communication overhead

Active Publication Date: 2012-07-11
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Abstract
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Problems solved by technology

[0012] The invention provides a process data acquisition method, a lower computer device, a data acquisition device and a process data acquisition system to solve the problem in the prior art that single data acquisition and transmission reduces the acquisition efficiency

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  • Process data acquisition method, device and system
  • Process data acquisition method, device and system
  • Process data acquisition method, device and system

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Embodiment Construction

[0051] In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0052] In the present invention, still refer to figure 1 In the semiconductor equipment control system shown, the data acquisition device still uses active reading to remotely acquire the process data collected by the lower computer device, but compared with the existing implementation method, the lower computer device in the present invention adopts batch collection and transmission. In this way, the collection efficiency can be improved. The following will be described in detail through examples.

[0053] refer to Figure 3.1 with 3.2 , is a flow chart of one process data acquisition described in the method embodiment of the present invention. in, Figure 3.1 Corresponding to the execution flow of the lower computer device,...

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Abstract

The invention provides a process data acquisition method, device and system, and aims to solve the problem that the single data acquirement and transmission adopted in the prior art lower the acquirement efficiency. The method comprises the steps as follows: receiving a batch data acquirement request; obtaining a data acquirement list corresponding to data acquirement list identification information in the request, wherein the data acquirement list includes a plurality of process data type identification information; carrying out traversal on each process data type identification information in the data acquirement list, acquiring process data corresponding to each process data type identification information one by one, and storing; and returning all of process data in batch after process data corresponding to all of process data type identification information is acquired and stored. The technical scheme provided by the invention reduces the cost of communication between a lower computer control system and a data acquirement control system, and improves the data acquirement efficiency.

Description

technical field [0001] The invention relates to data acquisition technology, in particular to a process data acquisition method, a lower computer device, a data acquisition device and a process data acquisition system. Background technique [0002] In the semiconductor processing technology, the equipment control system is used to control various semiconductor processing equipment for the production and manufacture of semiconductors. refer to figure 1 , is a structural diagram of a semiconductor device control system. The equipment control system includes a factory interface 1, an upper computer device 2, a lower computer device 3, and a data acquisition device 4, which are used to communicate factory orders and efficiently control semiconductor processing equipment. [0003] Wherein, the lower computer device 3 directly interacts with various semiconductor processing equipment. The upper computer device 2 communicates upwardly with the factory host computer through the f...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/00G06F17/40
Inventor 高伟勃杨洋刘振华
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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