Submicron-level positioning accuracy parallel regulating platform and regulating method thereof
A technology with positioning accuracy and sub-micron level, which can be used in machine/support, supporting machine, mechanical equipment, etc., and can solve the problem that the four-degree-of-freedom parallel mechanism cannot be used with precision measuring instruments.
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[0051] Such as figure 1 , figure 2 , image 3 , Figure 4 , Figure 5 , Image 6 , Figure 7 and Figure 8 As shown, the parallel adjustment platform with submicron level positioning accuracy described in the present invention includes a fixed platform 1 that is fixed and arranged horizontally, six telescopic poles installed on the fixed platform 1, and is horizontal in the initial state. The moving platform 3 that is arranged and driven by the six telescopic poles can move in a straight line in the left and right and front and rear directions and can rotate around the left and right and front and rear directions. The current state of the counter moving platform 3 is A measuring system 4 for measuring the position and its rotation angle around the left and right and front and rear directions on the horizontal plane, a controller 5 electrically connected to the measuring system 4, and a parameter input unit 11 connected to the controller 5, the six can The upper ends of...
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