Precise motion driving device based on bionics principle

Abstract

The invention relates to a precise motion driving device based on a bionics principle and belongs to the technical field of geometric quantity measurement. The precise motion driving device comprises a front sucker, a front piezoelectric ceramics micrometric displacement driving element, a motion output supporting point, a back piezoelectric ceramics micrometric displacement driving element, and a back sucker, wherein an iron soft magnetic conductive panel used for fixing the driving device is used as the peripheral equipment of the driving device; and the motion output supporting point is driven to realize the nanometer precise positioning driving in a large motion scope by coordinating the suction actions of the front and back suckers and the stretching actions of the front and back piezoelectric ceramics micrometric displacement driving elements and pushing. The precise motion driving device based on a bionics principle has simple structure, low heat productivity, no pause in motion process, high motion resolution ratio and large motion scope which is only limited by the size of the iron soft magnetic conductive panel. The precise motion driving device can realize the precise motion and is suitable for the occasions requiring low-speed running.

Description

technical field [0001] The invention relates to a precision motion drive device based on the bionic principle, which belongs to the technical field of geometric quantity measurement. Background technique [0002] In the field of geometric quantity measurement technology, the more commonly used precision motion and positioning devices usually use the drive mode of motor plus screw, which can realize a wide range of motion, but can only achieve micron-level motion resolution; Piezoelectric ceramic micro-displacement driver mode, this driving method can achieve nanoscale motion resolution, but the motion range is usually only micron level; to achieve nanoscale motion resolution and positioning accuracy in a large motion range, only coarse motion and The two-stage motion method combined with micro-movement uses a motor plus a screw to achieve a large range of motion, and then uses a piezoelectric ceramic micro-displacement drive device to achieve a small range of adjustment. The...

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Problems solved by technology

[0002] In the field of geometric quantity measurement technology, the more commonly used precision motion and positioning devices usually use the drive mode of motor plus screw, which can realize a wide range of motion, but can only achieve micron-level motion resolution; Piezoelectric ceramic micro-displacement driver mode, this driving method can achieve nanoscale motion resolution, but the motion range is usually only micron level; to achieve nanoscale motion resolution and positioning accuracy in a large motion range, only coarse motion and The two-stage motion method combined with micro-movement uses a motor plus a screw to achieve a large range of motion, and then uses a piezoelectric ceramic micro-displacement drive device to achieve a small range of adjustment. The disadvantage of this method is that the combination of the two drive methods is very difficult , can not achieve ultra-fine and smooth movement of the entire range of motion, especially can not achieve a wide range of high-precision scanning

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